A Novel Ultraviolet Solid State Laser in Lithography

LEI Liang; LI Fan; LIN Qinghua; ZHOU Jinyun; RAN Zuo

doi:10.3788/gzxb20124109.1019

[1] LIN K, JAIN K. Design and fabrication of stretchable multilayer selfaligned interconnects for flexible electronics and largearea sensor arrays using excimer laser photoablation［J］. IEEE Electron Device Letters, 2009, 30(1): 1417.

[2] ZIMMERMANN M, LINDLEIN N, VOELKEL R, et al. Microlens laser beam homogenizer: from theory to application［C］. SPIE, 2007, 6663: 113.

[3] LIU Shaojin, LING Zhihua. UV photoinduced aligning liquid crystal phase grating［J］. Acta Photonica Sinica, 2008, 37(8): 16751677.

[4] AGNESI A, ACQUA S D, PICCININI E, et al. Efficient wavelength conversion with high power passively switched diode pumped neodymium lasers［J］. IEEE Journal of Quantum Electronics, 1998, 34(8): 14801484.

[5] KOJIMA T, KONNO U, FUJIKAWA S, et al. 2W ultraviolet beam generation by fourthharmonic generation of allsolidstate laser［J］. Optics Letters, 2000, 25(1): 5860.

[6] WU R F, PHUA P B, LAI K S, et al. Compact 21 W 2 μm intracavity optical parametric oscillator［J］. Optics Letters, 2000, 25(7): 14601462.

[7] DONG Yunsheng, GUO Qiang, WANG Shouzhang, et al. High power ultraviolet Nd∶YAG laser pumped by laserdiode［J］. Infrared and Laser Engineering, 2008, 37(3): 449451.

[8] WAN Yunfang, HAN Kezhen, ZUO Chunhua, et al. An efficient diodepumped Nd∶YAG/LBO triplefrequency UV laser［J］. Acta Photonica Sinica, 2007, 36(12): 21822186.

[9] WU Y C, SASAKI T. CsB3O5: A nonlinear optical crystal［J］. Applied Physics Letters, 1993, 62(11): 26142617.

[10] PERRETT B, TERRY J, MASON P, et al. Spectral line narrowing in PPLN OPO devices for 1μm wavelength doubling［C］. SPIE, 2004, 5620: 275279.

[11] JACOBSSON B, TIIHONEN M, PASISKEYICIUS V, et al. Narrowband bulk Bragg grating optical parametric oscillator［J］. Optics Letters, 2005, 30(8): 22812284.