• Chinese Journal of Lasers
  • Vol. 30, Issue 10, 893 (2003)
[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Real-time Grey-tone Mask Technique for Fabrication of Microlens Array[J]. Chinese Journal of Lasers, 2003, 30(10): 893 Copy Citation Text show less
    References

    [1] A. Nottola, A. Gerardino, M. Gentili et al.. Fabrication of semi-continuous profile diffractive optical elements for beam shaping by electron beam lithography [J]. Microeletron. Eng., 2000, 53:325~328

    [2] E. B. Kley, B. Schnabel, U. D. Zeitner. E-beam lithography-an efficient tool for the fabrication of diffractive and microoptical elements [C]. SPIE, 1997, 3008:222~228

    [3] H. J. Jiang, X. C. Yuan, Z. S. Yun et al.. Fabrication of microlens in photosensitive hybrid sol-gel films using a gray scale mask [J]. Materials Science and Eng., 2001, 16:99~102

    [4] T. Lippert, C. David, M. Hauer et al.. Polymers for UV and near-IR irradiation [J]. J. Photochem. Photobio A: Chem., 2001, 145:87~92

    [5] N. Dumbravescu. Experiments for 3-D structuring of thick resists by gray tone lithography [J]. Materials Science in Semiconductor Processing, 2000, 3:569~573

    [6] J. Aiken, B. Bates. Programmable color liquid-crystal television spatial light modulator: transmittance properties and application to speckle-correlation displacement measurement [J]. Appl. Opt., 2000, 39(2):337~344

    [7] B. M. Tian. Electronic Display [M]. Beijing: Publishing House of Tsinghua Univ., 2001, Chapter 2:27~103 (in Chinese)

    [8] H. H. Hopkins. On the diffraction theory of optical images [C]. Proc. Roy. Soc: A, 1953, 217:408~432

    [9] A. Fimia, I. Pascual, A. Belendez. Optimized spatial frequency response in silver halide sensitized gelatin [J]. Appl. Opt., 1992, 31(20):4625~4627

    CLP Journals

    [1] Guo Xiaowei, Du Jinglei, Liu Yongzhi. Improving the Profiles of Imaging Patterns by Optimizing Mask in DMD-Based Maskless Photolithography[J]. Acta Optica Sinica, 2009, 29(3): 794

    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Real-time Grey-tone Mask Technique for Fabrication of Microlens Array[J]. Chinese Journal of Lasers, 2003, 30(10): 893
    Download Citation