• Chinese Journal of Lasers
  • Vol. 39, Issue 4, 416001 (2012)
Wang Xiangxian1、2、*, Wang Bo1, Fu Qiang1, Chen Yikai1, Hu Jigang1, Zhang Douguo1, and Ming Hai1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl201239.0416001 Cite this Article Set citation alerts
    Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 416001 Copy Citation Text show less

    Abstract

    Arrangements of point light sources array with 365 nm ultraviolet LED and focusing lens are designed and optimized. Area light source with uniform illumination and high intensity is achieved based on arrangements system. Lithography experiment with contact exposure method is realized with the optimized area optical source. Lithographic patterns are consistent with mask. The lithography method based on uniform area optical source from 365 nm LED arrays has advantages of simple structure, energy conservation and environmental protection.
    Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 416001
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