• Piezoelectrics & Acoustooptics
  • Vol. 42, Issue 1, 113 (2020)
WU Wenpeng, ZHAO Qingxu, WANG Yifan, and HU Zhen
Author Affiliations
  • [in Chinese]
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    DOI: 10-11977/j.issn.1004-2474.2020-01-025 Cite this Article
    WU Wenpeng, ZHAO Qingxu, WANG Yifan, HU Zhen. Research on Control of Micro-nano Manipulation Imaging System Based on Differential Feedforward ADRC[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 113 Copy Citation Text show less
    References

    [1] CHEN D X, YIN B H, LIU J B, et al. Active disturbance rejection control design for fast AFM[J]. Key Engineering Materials, 2015:670-674.

    [2] RIFAI O M E, YOUCEF-TOUMI K. On automating atomic force microscopes:An adaptive control approach[J].Control Engineering Practice,2007,15(3):349-361.

    [10] HERBST G. A simulative study on active disturbance rejection control (ADRC) as a control tool for practitioners[J]. Electronics, 2013, 2:246-279.

    WU Wenpeng, ZHAO Qingxu, WANG Yifan, HU Zhen. Research on Control of Micro-nano Manipulation Imaging System Based on Differential Feedforward ADRC[J]. Piezoelectrics & Acoustooptics, 2020, 42(1): 113
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