Suppression of Stress and Cracks in the Epitaxy of AlN by MOCVD Through a Hexagonal BN Nucleation Layer

WU Qing-qing; YAN Jian-chang; ZHANG Liang; CHEN Xiang; WEI Tong-bo; LI Yang; LIU Zhi-qiang; WEI Xue-cheng; WANG Jun-xi; LI Jin-min

doi:10.3788/gzxb20174611.1116001

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