• Chinese Journal of Lasers
  • Vol. 31, Issue s1, 495 (2004)
Cao Xiang-qun*, Lian Hua, and LI He-li
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    Cao Xiang-qun, Lian Hua, LI He-li. Testing the Depth of Phase Grating by Optical Power Spectrum[J]. Chinese Journal of Lasers, 2004, 31(s1): 495 Copy Citation Text show less

    Abstract

    Acording to Fourier optics, when a plane wave through a grating,the angle of different order and relative intensity are decided by the grating, many information of gratings can be deduced from its diffraction power spectrum. A new method using power spectrum of different orders to measure depth of phase gratings.three gratings were tested in this paper and the calculated depth was givem. The testing results of diffractive order of 6 gratings-about many orders itensity-were listed in table, The error of results is under 5%.
    Cao Xiang-qun, Lian Hua, LI He-li. Testing the Depth of Phase Grating by Optical Power Spectrum[J]. Chinese Journal of Lasers, 2004, 31(s1): 495
    Download Citation