Researching | Absolute linear-angular synchronous positioning at the microscale based on a metasurface array reflector

Journals >Chinese Optics Letters >Volume 23 >Issue 6 >Page 061201 > Article

Chinese Optics Letters
Vol. 23, Issue 6, 061201 (2025)

Absolute linear-angular synchronous positioning at the microscale based on a metasurface array reflector

Wanghang Gu^*, Junchen Liu, Xueyan Lin, Xinghua Qu, and Fumin Zhang^**

Author Affiliations

State Key Laboratory of Precision Measurement Technology and Instruments, Tianjin University, Tianjin 300072, China

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DOI: 10.3788/COL202523.061201 Cite this Article Set citation alerts

Wanghang Gu, Junchen Liu, Xueyan Lin, Xinghua Qu, Fumin Zhang, "Absolute linear-angular synchronous positioning at the microscale based on a metasurface array reflector," Chin. Opt. Lett. 23, 061201 (2025) Copy Citation Text

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References

[1] Y. Li, J. Wu, P. Yang et al. Multi-degree-of-freedom robots powered and controlled by microwaves. Adv. Sci., 9, 2203305(2022).

[2] Y. Tang, J. Liu, Y. Yang et al. Large range nano alignment for proximity lithography using complex grating. Opt. Laser Technol., 112, 101(2019).

[3] F. Xu, Y. Zhao, L. Ni et al. Two-dimensional Hanning self-convolution window for enhancing Moiré fringe alignment in lithography. Mech. Syst. Signal Process., 208, 111052(2024).

[4] L. Zhang, H. Zhan, X. Liu et al. A planar compound eye based microsystem for high precision 3D perception. PhotoniX, 5, 21(2024).

[5] K. Zhu, B. Guo, Y. Lu et al. Single-spot two-dimensional displacement measurement based on self-mixing interferometry. Optica, 4, 729(2017).

[6] H.-L. Hsieh, P.-C. Kuo. Heterodyne speckle interferometry for measurement of two-dimensional displacement. Opt. Express, 28, 724(2020).

[7] Q.-Y. Xin, Y.-C. Pei, B. Wang et al. Digital synchronous measurement method for two-dimensional in-plane displacement using check-code. Measurement, 225, 114047(2024).

[8] Y. Shimizu, H. Matsukuma, W. Gao. Optical sensors for multi-axis angle and displacement measurement using grating reflectors. Sensors, 19, 5289(2019).

[9] M. Zhang, H. Yang, Q. Niu et al. Combined displacement and angle sensor with ultra-high compactness based on self-imaging effect of optical microgratings. Sensors, 24, 908(2024).

[10] J. Zhu, G. Wang, S. Wang et al. A reflective-type heterodyne grating interferometer for three-degree-of-freedom subnanometer measurement. IEEE Trans. Instrum. Meas., 71, 1(2022).

[11] S. Zhou, V. Le, S. Xiong et al. Dual-comb spectroscopy resolved three-degree-of-freedom sensing. Photon. Res., 9, 243(2021).

[12] B. Chen, W. Mao, Y. Lou et al. Simultaneous measurement of the straightness error and its position using a modified Wollaston-prism-sensing homodyne interferometer. Meas. Sci. Technol., 31, 085004(2020).

[13] C. Ahn, Y. Na, J. Kim. Dynamic absolute distance measurement with nanometer-precision and MHz acquisition rate using a frequency comb-based combined method. Opt. Lasers Eng., 162, 107414(2023).

[14] Y.-L. Chen, Y. Shimizu, J. Tamada et al. Laser autocollimation based on an optical frequency comb for absolute angular position measurement. Precis. Eng., 54, 284(2018).

[15] X. Liang, J. Lin, T. Wu et al. Absolute angular measurement with optical frequency comb using a dispersive interferometry. Opt. Express, 28, 36095(2020).

[16] J.-A. Kim, J. W. Kim, C.-S. Kang et al. On-machine calibration of angular position and runout of a precision rotation stage using two absolute position sensors. Measurement, 153, 107399(2020).

[17] Y. Choe, C. G. Park. LiDAR-inertial-based absolute positioning with sparse DEM for accurate lunar landing. IEEE Trans. Aerospace Electron. Syst., 60, 3482(2024).

[18] R. Paris, M. Melik-Merkumians, G. Schitter. Probabilistic absolute position sensor based on objective laser speckles. IEEE Trans. Instrum. Meas., 65, 1188(2016).

[19] X. Guo, Y. Ding, Y. Duan et al. Nonreciprocal metasurface with space–time phase modulation. Light Sci. Appl., 8, 123(2019).

[20] Y. Yin, Q. Jiang, H. Wang et al. Color holographic display based on complex-amplitude metasurface. Laser Photon. Rev., 19, 2400884(2025).

[21] N. A. Rubin, Z. Shi, F. Capasso. Polarization in diffractive optics and metasurfaces. Adv. Opt. Photon., 13, 836(2021).

[22] H. Zang, Z. Xi, Z. Zhang et al. Ultrasensitive and long-range transverse displacement metrology with polarization-encoded metasurface. Sci. Adv., 8, eadd1973(2022).

[23] H. Zang, Z. Zhang, Z. Huang et al. High-precision two-dimensional displacement metrology based on matrix metasurface. Sci. Adv., 10, eadk2265(2024).

[24] R. Barboza, A. Babazadeh, L. Marrucci et al. Ultra-sensitive measurement of transverse displacements with linear photonic gears. Nat Commun, 13, 1080(2022).

[25] A. Tittl, A. Leitis, M. Liu et al. Imaging-based molecular barcoding with pixelated dielectric metasurfaces. Science, 360, 1105(2018).

[26] S. Wen, X. Xue, S. Wang et al. Metasurface array for single-shot spectroscopic ellipsometry. Light Sci. Appl., 13, 88(2024).

[27] S. Rao, Y. Huang, K. Cui et al. Anti-spoofing face recognition using a metasurface-based snapshot hyperspectral image sensor. Optica, 9, 1253(2022).

[28] M. Song, L. Feng, P. Huo et al. Versatile full-colour nanopainting enabled by a pixelated plasmonic metasurface. Nat. Nanotechnol., 18, 71(2023).

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Wanghang Gu, Junchen Liu, Xueyan Lin, Xinghua Qu, Fumin Zhang, "Absolute linear-angular synchronous positioning at the microscale based on a metasurface array reflector," Chin. Opt. Lett. 23, 061201 (2025)

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