Study on Micro-Deformation Measurement for Micro-Mechanical Parts with Optical Interferometry

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 29 >Issue 5 >Page 37 > Article

Opto-Electronic Engineering
Vol. 29, Issue 5, 37 (2002)

Study on Micro-Deformation Measurement for Micro-Mechanical Parts with Optical Interferometry

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Micro-Deformation Measurement for Micro-Mechanical Parts with Optical Interferometry[J]. Opto-Electronic Engineering, 2002, 29(5): 37 Copy Citation Text

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Abstract

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study on Micro-Deformation Measurement for Micro-Mechanical Parts with Optical Interferometry[J]. Opto-Electronic Engineering, 2002, 29(5): 37

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