• Acta Photonica Sinica
  • Vol. 43, Issue 4, 426001 (2014)
GAO Fen1、2、3、*, JIANG Zhuang-de1、2, LI Bing1、2, and TIAN Ai-ling3
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • show less
    DOI: 10.3788/gzxb20144304.0426001 Cite this Article
    GAO Fen, JIANG Zhuang-de, LI Bing, TIAN Ai-ling. Multi-step Phase-shifting Algorithm Based on Extended Averaging Technique and its Error Suppression Characteristics Comparison[J]. Acta Photonica Sinica, 2014, 43(4): 426001 Copy Citation Text show less
    References

    [1] OTAKI K, OTA K, NISHIYAMA I, et al. Development of the point diffraction interferometer for extreme ultraviolet lithography: Design, fabrication, and evaluation[J]. Journal of Vacuum Science & Technology B, 2002, 20(6): 2449-2458.

    [2] OTA K, YAMAMOTO T, FUKUDA Y, et al. Advanced point diffraction interferometer for EUV aspherical mirrors[C]. SPIE, 2001, 4343: 543-550.

    [3] GARY E S, DONALD W P, MICHAEL A J, et al. 100-picometer interferometry for EUVL[C].SPIE, 2002, 4688: 317-328.

    [4] WANG D, YANG Y, CHEN C, et al. Point diffraction interferometer with adjustable fringe contrast for testing spherical surfaces[J]. Applied Optics, 2011, 50(16): 2342-2348.

    [5] NIE L, HU M, LIU B, et al. Fiber Point diffraction interferometer for measuring spherical surface[C].SPIE, 2010, 7749: 77490B.

    [6] ZHANG Yu, JIN Chun-shui, MA Dong-mei, et al. Measuring technology for wavefront aberration of EUVL objective system[J]. Infrared and Laser Engineering, 2012, 41(12): 3384-3389.

    [7] WEI Hao-ming, XING Ting-wen, LI Yun, et al. Measurement errors in 632.8 nm high precision phase-shifting Fizeau interferometer[J].Laser & Optoelectronics Progress, 2010, 47(4): 041202.

    [8] XING Ting-wen, HE Guo-liang, SHU Liang. Measurement errors in the 193 nm phase-shifting point diffraction interferometer[J]. Opto-Electronic Engineering, 2009, 36(2): 67-72.

    [9] WANG Sheng-wang, CHENG Lei, CHENG Jin-bang, et al. Phase-shifting error analysis of Fizeau spherical interferometer[J]. Acta Photonica Sinica,1996, 25(10): 883-888.

    [10] LIU Yong, SHENG Yi-bing, PENG Jian-hua. Effect of PZT phase-shifting and CCD nonlinear testing of spherical surfaces on high precision testing of spherical surfaces[J]. Jourrnal of Zhejiang University(Engineering Science) , 2012, 46(11): 2116-2120.

    [11] MIAO Er-long, ZHANG Jian, GU Yong-qiang, et al. Measurement error analysis of high precision Fizeau interferometer for lithography projection objective[J].Chinese Journal of Lasers, 2010, 37(08): 2029-2034.

    [12] ZEN Dan-hua, XIAO Ti-qiao, XI Zai-jun, et al. Detector noninear error and compensation in phase-stepping interferometry[J]. Acta Optica Sinica, 2006, 26(09): 1358-1362.

    [13] SCHMIT J, CREATH K. Extended averaging technique for derivation of error-compensating algorithms in phase-shifting interferometry[J]. Applied Optics, 1995, 34(19): 3610-3619.

    [14] SCHWIDER J, BUTOW R, ELSSNER K, et al. Digital wave-front measuring interferometry: some systematic error sources[J]. Applied Optics, 1983, 22(21): 3421-3432.

    [15] SCHWIDER J, FALKENSTORFER O, SCHREIBER H, et al. New compensating four-phase algorithm for phase-shift interferometry[J]. Optical Engineering, 1993, 32(8): 1883-1885.

    CLP Journals

    [1] Lu Binghui, Liu Guodong, Sun Heyi, Liu Bingguo, Chen Fengdong. Phase Extraction Method of Microsphere Interferometry Based on Error Complementary Correction[J]. Chinese Journal of Lasers, 2015, 42(5): 508004

    [2] TIAN Ai-ling, MA Di, WANG Da-sen, LIU Jian, LIU Bing-cai, ZHU Xue-liang. Phase-shifting Calibration Method of Wavelength-shifting Interference Measurement[J]. Acta Photonica Sinica, 2016, 45(7): 70712001

    [3] LI Hui-peng, TAN Meng-xi, ZHU Wei-wei, ZHENG Xiao, LI Jiao. Improved Carré Phase Shifting Algorithm Based on White Light Interferometry[J]. Acta Photonica Sinica, 2016, 45(6): 612001

    GAO Fen, JIANG Zhuang-de, LI Bing, TIAN Ai-ling. Multi-step Phase-shifting Algorithm Based on Extended Averaging Technique and its Error Suppression Characteristics Comparison[J]. Acta Photonica Sinica, 2014, 43(4): 426001
    Download Citation