Characters Study of the ZrO2 Films in Different Oxygen Partial Pressure

ZHANG Dong-ping; SHAO Jian-da; SHAO Shu-ying; Qi Hong-ji; GAO Wei-dong; FAN Zheng-xiu

Journals >Chinese Journal of Lasers >Volume 31 >Issue s1 >Page 519 > Article

Chinese Journal of Lasers
Vol. 31, Issue s1, 519 (2004)

Characters Study of the ZrO₂ Films in Different Oxygen Partial Pressure

ZHANG Dong-ping^*, SHAO Jian-da, SHAO Shu-ying, Qi Hong-ji, GAO Wei-dong, and FAN Zheng-xiu

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[in Chinese]

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ZHANG Dong-ping, SHAO Jian-da, SHAO Shu-ying, Qi Hong-ji, GAO Wei-dong, FAN Zheng-xiu. Characters Study of the ZrO₂ Films in Different Oxygen Partial Pressure[J]. Chinese Journal of Lasers, 2004, 31(s1): 519 Copy Citation Text

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Abstract

ZrO2 films were deposited by electron beam evaporation in different oxygen pressure. The effect of oxygen pressure during film deposition on the films' microstructure, optical characters and laser induced damage threshold (UDT) were studied by scanning probe microscopy, optical spectrometer and UDT measurement.

Keywords

laser induced damage threshold (UDT)optical film material oxygen partial pressure surface roughness

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