• Acta Photonica Sinica
  • Vol. 50, Issue 9, 0912001 (2021)
Zhengjie WEI, Di ZHANG, and Guanhao WU
Author Affiliations
  • State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments, Tsinghua University, Beijing100084, China
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    DOI: 10.3788/gzxb20215009.0912001 Cite this Article
    Zhengjie WEI, Di ZHANG, Guanhao WU. Development of Miniature Optical Encoder for Precise Displacement Measurement[J]. Acta Photonica Sinica, 2021, 50(9): 0912001 Copy Citation Text show less

    Abstract

    Based on the principle of double grating interference scanning, the miniaturized development of the interference scanning type grating encoder is realized by multiplexing transmission grating. A prototype grating encoder was developed suitable for precision displacement measurement. The circuit system of the sensor includes a signal conversion amplifier circuit and a signal processing circuit placed in the D-SUB shell. The 15-pin interface outputs four analog differential signals with a level of 2.5±0.5 V, which can be used for high subdivision to achieve high resolution, With RS422 interface adaptability, it can also improve the anti-interference ability of the sensor in long-distance transmission. The capacitance sensor is used as the displacement reference. The principle prototype of the grating encoder achieves a repeatability accuracy of ±30 nm, and meets the measurement speed requirement of 10 mm/s. The short-term displacement stability of 10 s reaches 5 nm, and the long-term stability of 6 hours reaches 70 nm.
    Zhengjie WEI, Di ZHANG, Guanhao WU. Development of Miniature Optical Encoder for Precise Displacement Measurement[J]. Acta Photonica Sinica, 2021, 50(9): 0912001
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