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    Journals >Chinese Journal of Lasers >Volume 16 >Issue 10 >Page 603 > Article
    • Chinese Journal of Lasers
    • Vol. 16, Issue 10, 603 (1989)
    Preparation of AIN thin film by magnetron sputtering
    Fan zhengxiu and He Chaoling
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    Fan zhengxiu, He Chaoling. Preparation of AIN thin film by magnetron sputtering[J]. Chinese Journal of Lasers, 1989, 16(10): 603 Copy Citation Text show less

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    Fan zhengxiu, He Chaoling. Preparation of AIN thin film by magnetron sputtering[J]. Chinese Journal of Lasers, 1989, 16(10): 603
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