Researching | Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

Journals >Chinese Optics Letters >Volume 22 >Issue 5 >Page 050601 > Article

Chinese Optics Letters
Vol. 22, Issue 5, 050601 (2024)

Robust thin-film lithium niobate modulator on a silicon substrate with backside holes

Mai Wang¹, Lu Qi^2,3, Haohua Wang^2,3, Ziliang Ruan¹..., Gengxin Chen¹, Bin Chen¹, Shengqi Gong¹, Kaixuan Chen^2,3 and Liu Liu^1,4,*|Show fewer author(s)

Author Affiliations

¹State Key Laboratory of Extreme Photonics and Instrumentation, College of Optical Science and Engineering, International Research Center for Advanced Photonics, Zhejiang University, Hangzhou 310058, China

²Guangdong Provincial Key Laboratory of Optical Information Materials and Technology, South China Academy of Advanced Optoelectronics, South China Normal University, Higher-Education Mega-Center, Guangzhou 510006, China

³National Center for International Research on Green Optoelectronics, South China Normal University, Guangzhou 510006, China

⁴Jiaxing Key Laboratory of Photonic Sensing & Intelligent Imaging, Intelligent Optics & Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, China

show less

DOI: 10.3788/COL202422.050601 Cite this Article Set citation alerts

Mai Wang, Lu Qi, Haohua Wang, Ziliang Ruan, Gengxin Chen, Bin Chen, Shengqi Gong, Kaixuan Chen, Liu Liu, "Robust thin-film lithium niobate modulator on a silicon substrate with backside holes," Chin. Opt. Lett. 22, 050601 (2024) Copy Citation Text

show less

References

[1] A. Boes, L. Chang, C. Langrock et al. Lithium niobate photonics: unlocking the electromagnetic spectrum. Science, 379, eabj4396(2023).

[2] E. L. Wooten, K. M. Kissa, A. Yi-Yan et al. A review of lithium niobate modulators for fiber-optic communications systems. IEEE J. Sel. Top. Quantum Electron., 6, 69(2000).

[3] M. De Micheli, J. Botineau, P. Sibillot et al. Fabrication and characterization of titanium indiffused proton exchanged (TIPE) waveguides in lithium niobate. Opt. Commun., 42, 101(1982).

[4] M. G. Vazimali, S. Fathpour. Applications of thin-film lithium niobate in nonlinear integrated photonics. Adv. Photonics, 4, 034001(2022).

[5] C. Wang, M. Zhang, X. Chen et al. Integrated lithium niobate electro-optic modulators operating at CMOS-compatible voltages. Nature, 562, 101(2018).

[6] M. He, M. Xu, Y. Ren et al. High-performance hybrid silicon and lithium niobate Mach–Zehnder modulators for 100 Gbit s−1 and beyond. Nat. Photonics, 13, 359(2019).

[7] Y. Liu, H. Li, J. Liu et al. Low Vπ thin-film lithium niobate modulator fabricated with photolithography. Opt. Express, 29, 6320(2021).

[8] M. Xu, Y. Zhu, F. Pittalà et al. Dual-polarization thin-film lithium niobate in-phase quadrature modulators for terabit-per-second transmission. Optica, 9, 61(2022).

[9] F. Yang, X. Fang, X. Chen et al. Monolithic thin film lithium niobate electro-optic modulator with over 110 GHz bandwidth. Chin. Opt. Lett., 20, 022502(2022).

[10] G. Chen, Y. Gao, H.-L. Lin et al. Compact and efficient thin-film lithium niobate modulators. Adv. Photon. Res., 4, 2300229(2023).

[11] J. Cai, C. Guo, C. Lu et al. Design optimization of silicon and lithium niobate hybrid integrated traveling-wave Mach-Zehnder modulator. IEEE Photonics J., 13, 2200206(2021).

[12] P. Kharel, C. Reimer, K. Luke et al. Breaking voltage–bandwidth limits in integrated lithium niobate modulators using micro-structured electrodes. Optica, 8, 357(2021).

[13] X. Liu, H. Liu, B. Xiong et al. Broadband meandered thin-film lithium niobate modulator with ultra-low half-wave voltage. IEEE Photon. Technol. Lett., 34, 424(2022).

[14] X. Huang, Y. Liu, Z. Li et al. Advanced electrode design for low-voltage high-speed thin-film lithium niobate modulators. IEEE Photonics J., 13, 7900609(2021).

[15] G. Chen, K. Chen, R. Gan et al. High performance thin-film lithium niobate modulator on a silicon substrate using periodic capacitively loaded traveling-wave electrode. APL Photonics, 7, 026103(2022).

[16] Y. Xue, R. Gan, K. Chen et al. Breaking the bandwidth limit of a high-quality-factor ring modulator based on thin-film lithium niobate. Optica, 9, 1131(2022).

[17] M. Xu, Y. Zhu, J. Tang et al. Attojoule/bit folded thin film lithium niobate coherent modulators using air-bridge structures. APL Photonics, 8, 066104(2023).

[18] Z. Ruan, J. Hu, Y. Xue et al. Metal based grating coupler on a thin-film lithium niobate waveguide. Opt. Express, 28, 35615(2020).

Figures&Tables (7)

References (18)

Copy Citation Text

Mai Wang, Lu Qi, Haohua Wang, Ziliang Ruan, Gengxin Chen, Bin Chen, Shengqi Gong, Kaixuan Chen, Liu Liu, "Robust thin-film lithium niobate modulator on a silicon substrate with backside holes," Chin. Opt. Lett. 22, 050601 (2024)

Download Citation

Set citation alerts for the article

Set citation alerts for the article

Save the article for my favorites

Paper Information

Recommended Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology

Set citation alerts for the article

Please enter your email address