• Bulletin of the Chinese Ceramic Society
  • Vol. 43, Issue 10, 3814 (2024)
SHI Yunlong, LIN Rongchuan*, WEI Shasha, SUI Yusheng, and DONG Tianlei
Author Affiliations
  • College of Marine Equipment and Mechanical Engineering, Jimei University, Xiamen 361021, China
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    DOI: Cite this Article
    SHI Yunlong, LIN Rongchuan, WEI Shasha, SUI Yusheng, DONG Tianlei. Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates[J]. Bulletin of the Chinese Ceramic Society, 2024, 43(10): 3814 Copy Citation Text show less
    References

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    [7] YU Q M, CEN L. Residual stress distribution along interfaces in thermal barrier coating system under thermal cycles[J]. Ceramics International, 2017, 43(3): 3089-3100.

    [8] FENG Z B, CHAYAHARA A, YAMADA H, et al. Surface stress measurement with interference microscopy of thick homoepitaxial single-crystal diamond layers[J]. Diamond and Related Materials, 2010, 19(12): 1453-1456.

    [9] CHIU K A, WU P H, PENG C Y, et al. Homoepitaxial growth and stress analysis of (111) diamond film with embedded gold islands[J]. Vacuum, 2015, 118: 104-108.

    [10] SEIDL W M, BARTOSIK M, KOLOZSVRI S, et al. Influence of coating thickness and substrate on stresses and mechanical properties of (Ti, Al, Ta)N/(Al, Cr)N multilayers[J]. Surface and Coatings Technology, 2018, 347: 92-98.

    [12] SLACK G A, BARTRAM S F. Thermal expansion of some diamondlike crystals[J]. Journal of Applied Physics, 1975, 46(1): 89-98.

    [19] GRUEN D M, LIU S Z, KRAUSS A R, et al. Buckyball microwave plasmas: fragmentation and diamond-film growth[J]. Journal of Applied Physics, 1994, 75(3): 1758-1763.

    [22] CHASON E, SHELDON B W, FREUND L B, et al. Origin of compressive residual stress in polycrystalline thin films[J]. Physical Review Letters, 2002, 88(15): 156103.

    [23] FERRARI A C, ROBERTSON J. Origin of the 1 150 cm-1 Raman mode in nanocrystalline diamond[J]. Physical Review B, 2001, 63(12): 121405.

    [25] ZHANG G F, ZULKHARNAY R, GANSS F, et al. Annealing-induced evolution of boron-doped polycrystalline diamond[J]. Physical Review Materials, 2024, 8(4): 044802.

    SHI Yunlong, LIN Rongchuan, WEI Shasha, SUI Yusheng, DONG Tianlei. Residual Stress Analysis and Regulation of Diamond Thin Films on AlN Ceramics Substrates[J]. Bulletin of the Chinese Ceramic Society, 2024, 43(10): 3814
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