• Chinese Journal of Lasers
  • Vol. 34, Issue s1, 231 (2007)
[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Thin Film Inductor with Air Core Fabricated by Laser Micro-Cladding Method[J]. Chinese Journal of Lasers, 2007, 34(s1): 231 Copy Citation Text show less

    Abstract

    The thin film inductors with air core have been fabricated by laser micro-cladding technology. It has been studied systematically that how the change of laser power density affects the line width as well as how the inductive structure affects inductive electronic performance. The experimental results show that increasing the turns, broadening the distance between two center lines and enlarging line width will improve inductance at a different level. With the optimum of the laser processing parameters and the structural parameters, rectangular-spiral inductors are processed with area of 5 mm×5 mm and 9 mm×9 mm, line width of 100 μm and 120 μm, distance between two center lines of 250 μm and 500 μm, circle numbers of 8 and 16, and thickness of 1 μm. For those inductors, the range of inductance is from 240 nH±3 nH to 1.2 μH±3 nH, the inductance per unit area was up to 14.81 nH/ mm2 in the frequency range of 100 kHz to 1 MHz . By this technology, the experimental results demonstrate that the thin film inductors fabricated by optimizing structural parameters have the best performances at the same area and structure.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Study of Thin Film Inductor with Air Core Fabricated by Laser Micro-Cladding Method[J]. Chinese Journal of Lasers, 2007, 34(s1): 231
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