VOx films prepared by DC magnetron sputtering

Xu Yang; Changlong Cai; Shun Zhou; Huan Liu; Weiguo Liu

doi:10.3788/COL201008s1.0137

Journals >Chinese Optics Letters >Volume 8 >Issue s1 >Page 137 > Article

Chinese Optics Letters
Vol. 8, Issue s1, 137 (2010)

VOx films prepared by DC magnetron sputtering

Xu Yang, Changlong Cai, Shun Zhou, Huan Liu, and Weiguo Liu

Author Affiliations

Micro-Optoelectrical System Laboratory, Xi’an Technological University, Xi’an 710032, China

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DOI: 10.3788/COL201008s1.0137 Cite this Article Set citation alerts

Xu Yang, Changlong Cai, Shun Zhou, Huan Liu, Weiguo Liu. VOx films prepared by DC magnetron sputtering[J]. Chinese Optics Letters, 2010, 8(s1): 137 Copy Citation Text

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References

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[2] E. E. Chain, Appl. Opt. 30, 2782 (1991).

[3] J. P. Schreckenbach and P. Strauch, Appl. Surf. Sci. 143, 6 (1999).

[4] H. TaKei and S. Koide, J. Phys . Soc. Japan 21, 1010 (1966).

Data from CrossRef

[1] M. Jalal, M. Lutful Hai, Sameer Ajmera, Mahmoud Almasri. Noise Reduction of Amorphous SixGeyO1–x–yThin Films for Uncooled Microbolometers by Si3N4Passivation and Annealing in Vacuum. IEEE Sensors Journal, 16, 1681(2016).

[2] Asiful H. Seikh. Structural and Optical Properties of V2O5 Thin Films Grown by PLD Technique. Transactions of the Indian Institute of Metals, 75, 193(2022).

[3] Xu Ma, Xinkun Liu, Haizhu Li, Angran Zhang, Mingju Huang. Influence of oxygen flow rate on metal–insulator transition of vanadium oxide thin films grown by RF magnetron sputtering. Applied Physics A, 123, 162(2017).

[4] Erol Kose, Senem Aydogu. The structural, optical properties, surface and electrical properties of vanadium pentoxide (V2O5) films produced at different substrate temperatures. Optik, 268, 169775(2022).

[5] P. Deepak Raj, Sudha Gupta, M. Sridharan. Influence of the crystalline nature of growing surface on the properties of vanadium pentoxide thin films. Ceramics International, 43, 9401(2017).

[6] P. Deepak Raj, Sudha Gupta, M. Sridharan. Studies on nanostructured V2O5/V/V2O5 films for un-cooled IR detector application. Journal of Materials Science: Materials in Electronics, 27, 7494(2016).

Xu Yang, Changlong Cai, Shun Zhou, Huan Liu, Weiguo Liu. VOx films prepared by DC magnetron sputtering[J]. Chinese Optics Letters, 2010, 8(s1): 137

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