• Chinese Journal of Lasers
  • Vol. 49, Issue 13, 1301003 (2022)
Yangshuai Li, Yanfeng Zhang, Zhigang Liu, Shenlei Zhou..., Mingying Sun and Jianqiang Zhu*|Show fewer author(s)
Author Affiliations
  • Key Laboratory of High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/CJL202249.1301003 Cite this Article Set citation alerts
    Yangshuai Li, Yanfeng Zhang, Zhigang Liu, Shenlei Zhou, Mingying Sun, Jianqiang Zhu. Surface Cleanliness Control Technology of Transport Mirrors in Final Target System[J]. Chinese Journal of Lasers, 2022, 49(13): 1301003 Copy Citation Text show less
    Testing apparatus
    Fig. 1. Testing apparatus
    Nitrogen supply system of air knife
    Fig. 2. Nitrogen supply system of air knife
    Influence of measurement period on the number of particles
    Fig. 3. Influence of measurement period on the number of particles
    Removal efficiency of Al2O3 particles with different sizes. (a) 2550 μm; (b) >50100 μm; (c) >100 μm
    Fig. 4. Removal efficiency of Al2O3 particles with different sizes. (a) 2550 μm; (b) >50100 μm; (c) >100 μm
    Influence of inlet pressure on removal efficiency of Al2O3 particles
    Fig. 5. Influence of inlet pressure on removal efficiency of Al2O3 particles
    Removal efficiency of different types of particles
    Fig. 6. Removal efficiency of different types of particles
    Removal efficiency of particles under different purging times
    Fig. 7. Removal efficiency of particles under different purging times
    Removal efficiency of stainless steel particles under different inlet pressures
    Fig. 8. Removal efficiency of stainless steel particles under different inlet pressures
    Relationship between wind speed at the end of transmission mirror and inlet pressur under different outlet gaps of air knife
    Fig. 9. Relationship between wind speed at the end of transmission mirror and inlet pressur under different outlet gaps of air knife
    Removal efficiency of stainless steel particles under different outlet gaps of air knife
    Fig. 10. Removal efficiency of stainless steel particles under different outlet gaps of air knife
    Purging process of Al2O3 particles. (a) Before purging; (b) during purging; (c) after purging
    Fig. 11. Purging process of Al2O3 particles. (a) Before purging; (b) during purging; (c) after purging
    ParameterContent
    Objective
    Gain1.0×
    Gamma0.92
    White level112
    Black level3
    Threshold075
    Measured diameter/mm20
    Lamp152
    Table 1. Microscopic inspection system settings
    No.Contaminant typeInlet pressure /MPaInstallation height /mmAir knife outlet gap /mmPurging times
    1Alumina1.040.11
    2Alumina1.070.11
    3Alumina1.0100.11
    4Alumina1.240.11
    5Stainless steel1.240.11
    6Dust1.240.11
    7Dust1.240.11,4
    8Stainless steel1.240.11,4
    9Alumina1.540.11
    10Stainless steel1.540.11
    11Dust1.540.11
    12Stainless steel1.040.051
    13Stainless steel1.240.051
    14Stainless steel1.540.051
    Table 2. Experimental design and arrangement
    Yangshuai Li, Yanfeng Zhang, Zhigang Liu, Shenlei Zhou, Mingying Sun, Jianqiang Zhu. Surface Cleanliness Control Technology of Transport Mirrors in Final Target System[J]. Chinese Journal of Lasers, 2022, 49(13): 1301003
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