Yangshuai Li, Yanfeng Zhang, Zhigang Liu, Shenlei Zhou, Mingying Sun, Jianqiang Zhu. Surface Cleanliness Control Technology of Transport Mirrors in Final Target System[J]. Chinese Journal of Lasers, 2022, 49(13): 1301003

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- Chinese Journal of Lasers
- Vol. 49, Issue 13, 1301003 (2022)

Fig. 1. Testing apparatus

Fig. 2. Nitrogen supply system of air knife

Fig. 3. Influence of measurement period on the number of particles

Fig. 4. Removal efficiency of Al2O3 particles with different sizes. (a) 2550 μm; (b) >50100 μm; (c) >100 μm

Fig. 5. Influence of inlet pressure on removal efficiency of Al2O3 particles

Fig. 6. Removal efficiency of different types of particles

Fig. 7. Removal efficiency of particles under different purging times

Fig. 8. Removal efficiency of stainless steel particles under different inlet pressures

Fig. 9. Relationship between wind speed at the end of transmission mirror and inlet pressur under different outlet gaps of air knife

Fig. 10. Removal efficiency of stainless steel particles under different outlet gaps of air knife

Fig. 11. Purging process of Al2O3 particles. (a) Before purging; (b) during purging; (c) after purging
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Table 1. Microscopic inspection system settings
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Table 2. Experimental design and arrangement

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