LIU Ying-ming, XU Jing, ZHONG Shao-long, ZHAI Lei-ying, WU Ya-ming. Large-scale MOEMS scanning mirror actuated by vertical comb[J]. Optics and Precision Engineering, 2013, 21(2): 400

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- Optics and Precision Engineering
- Vol. 21, Issue 2, 400 (2013)
Abstract

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