The interaction of scattering light between nanoparticles in nano-array is considered in its phase transition from semiconductor to metal.The mathematical model of vanadium dioxide nanoparticle is established based on the absorption and scattering properties of small particles,and the property of complex refractive changing with the various different temperature and wavelength.The results show that the main contribution to the optical response with wavelength is absorption cross section in the infrared,and the absorption peak of metal phase is near 980 nm.The change of extinction coefficient is larger in the infrared region than in the visible region.The study indicated that the extinction cross section of nano-array is depended on the distance between particles.When the distance between particles increases,the peak position of extinction cross section appears red-shift and the peak value of extinction cross section increases.However,when the distance is more than a certain value,the peak will decrease.The vanadium dioxide nano-array is prepared by magnetic reactive sputtering with the mask of porous alumina.The measurement results show that the transmittance of nano-array is higher than the transmittance of vanadium dioxide film.