Experimental study on RF-discharged plasma characteristics in Au and Cu ion Laser

[in Chinese]; [in Chinese]; [in Chinese]; D.Teuner

Journals >Chinese Journal of Lasers >Volume 30 >Issue 2 >Page 120 > Article

Chinese Journal of Lasers
Vol. 30, Issue 2, 120 (2003)

Experimental study on RF-discharged plasma characteristics in Au and Cu ion Laser

[in Chinese]^1、2、*, [in Chinese]², [in Chinese]², and D.Teuner³

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], D.Teuner. Experimental study on RF-discharged plasma characteristics in Au and Cu ion Laser[J]. Chinese Journal of Lasers, 2003, 30(2): 120 Copy Citation Text

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Abstract

The discharge plasma characteristics of the RF sputtered Cu and Au in He gas are investigated. The sheath thickness and the real and imaginary part of the plasma impedance are obtained.In addition, on the basis of Gadyak′s RF discharge model, the electron density in the discharge plasma is calculated for different pressure and current density.

Keywords

mental ion laser RF sputter physics of plasma

[in Chinese], [in Chinese], [in Chinese], D.Teuner. Experimental study on RF-discharged plasma characteristics in Au and Cu ion Laser[J]. Chinese Journal of Lasers, 2003, 30(2): 120

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