Formaldehyde gas sensor based on TiO2 thin membrane integrated with nano silicon structure

Xuan ZHENG; An-jie MING; Li YE; Feng-hua CHEN; Xi-long SUN; Wei-bing LIU; Chao-bo LI; Wen OU; Wei-bing WANG; Da-peng CHEN

doi:10.1007/s11801-016-5249-5

Journals >Optoelectronics Letters >Volume 12 >Issue 4 >Page 308 > Article

Optoelectronics Letters
Vol. 12, Issue 4, 308 (2016)

Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure

Xuan ZHENG¹, An-jie MING^2、*, Li YE³, Feng-hua CHEN³, Xi-long SUN¹, Wei-bing LIU², Chao-bo LI², Wen OU², Wei-bing WANG², and Da-peng CHEN²

Author Affiliations

¹School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

²Smart Sensing Research and Development Centre, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China

³Laboratory of Advanced Polymer Materials, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100190, China

show less

DOI: 10.1007/s11801-016-5249-5 Cite this Article

ZHENG Xuan, MING An-jie, YE Li, CHEN Feng-hua, SUN Xi-long, LIU Wei-bing, LI Chao-bo, OU Wen, WANG Wei-bing, CHEN Da-peng. Formaldehyde gas sensor based on TiO₂ thin membrane integrated with nano silicon structure[J]. Optoelectronics Letters, 2016, 12(4): 308 Copy Citation Text

show less

References

[1] T. Plecenika, M. Mosko and A.A. Haidry, Sensors and Actuators B 207, 351 (2015).

[2] Shunping Zhang, Tao Lei, Dong Li, Guozhu Zhang and Changsheng Xie, Sensors and Actuators B 202, 964 (2014).

[3] Xiaogan Lia, Xiaoxin Li, Jing Wang and Shiwei Lin, Sensors and Actuators B 219, 158 (2015).

[4] P.M. Perillo and D.F. Rodríguez, Journal of Alloys and Compounds 657, 765 (2016).

[5] Nicolae Barsan and Udo Weimarl, Journal of Electroceramics 7, 143 (2001).

[6] Yang Xia, Bangwu Liu and Jie Liu, Solar Energy 86, 3004 (2012).

[7] Yang Xia, Bangwu Liu and Jie Liu, Solar Energy 85, 1574 (2011).

[8] MY Afridi, JS Suehle, ME Zaghloul and DW Berning, IEEE Sensors Journal 2, 644 (2002).

[9] Jie Liu, Bangwu Liu and Sihua Zhong, A Mask-less Scheme to Generate Nano-honeycomb-textured Structures for Solar Cells, Science China Press and Springer-Verlag Berlin Heidelberg, 1575 (2014).

Download Citation

Save the article for my favorites

Paper Information