In order to efficiently correct the optical proximity effect in Laser Direct Writing (LDW), a correction method for low resolution acoustooptic modulator is proposed. Firstly, based on Iterative Error-Correction Method (IECM) proposed by Rajesh Menon, one virtual high resolution acoustooptic modulator is used to correct the direct writing pattern, and the exposure data obtained are converted and rounded to that corresponding to the low resolution acoustooptic modulator, then the exposure data of spots nearest to each error area barycenter are modulated, and the above steps help IECM correct the optical proximity with low resolution acoustooptic modulator and make a thorough optimization. Experimental results indicate that, taking “L” design pattern as example, compared with IECM unable to correct the direct writing pattern with low resolution acoustooptic modulator, the proposed method in this subject can be used to correct the direct writing pattern, which decreases pattern error value by 70.88% relative to the initial error value.