[1] FANG X L, QU N S, ZHANG Y D, et al.. Effects of pulsating electrolyte flow in electrochemical machining ［J］. Journal of Materials Processing Technology, 2014, 214(1): 36-43.

[2] ROLF S, VIOLA K, PHILIPPE A, et al.. Electrochemical micromachining ［J］. Science, 2000, 289: 98-101.

[3] KONG Q C, LI Y, LIU G D, et al.. Three-electrode pulse power supply for micro ECM ［J］. Journal of Tsinghua University(Scicence and Technology), 2015,55(3): 266-272. (in Chinese)

[4] CHOI S H, KIM B H, SHIN H S, et al.. Analysis of the electrochemical behaviors of WC-CO alloy for micro ECM ［J］. Journal of Materials Processing Technology, 2013, 213(4): 621-630.

[5] MATTHIAS K, VIOLA K, ROLF S. Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision ［J］. Electrochimica Acta, 2003, 48: 3213 -3219.

[6] ZHANG CH Y, LI ZH Y, WANG Y M, et al.. Mechanical-electrochemical micro-etching under laser shock effect ［J］. Opt. Precision Eng., 2012, 20(6): 1310-1315 . (in chinese)

[7] LI X H, WANG ZH L, ZHAO W SH. Electrolytic micromachining with high frequency short pulse current ［J］. Chinese Journal of Mechanical Engineering, 2006, 42(1): 162-167. (in chinese)

[8] WANG M H, ZHU D, WANG L, et al.. Preparation and application of electrodes used for the tool of micro- electrochemical machining ［J］. Microfabrication Technology, 2007,5: 52-60. (in chinese)

[9] WANG M H, ZHU D, XU H Y. Use of micro-helix electrodes in improving performance of micro-ECM ［J］. Mechanical Science and Technology, 2006,3(25): 348-351. (in Chinese)

[10] JO C H, KIM B H, CHU C N. Micro electrochemical machining for complex internal micro features ［J］. CIRP Annals - Manufacturing Technology, 2009, 58(1): 181-184.

[12] RAJURKAR K P, ZHU D. Improvement of electrochemical machining accuracy by using orbital electrode movement ［J］. CIRP Annals - Manufacturing Technology, 1999,48(1): 139-142.

[13] WANG W, ZHU D, QU N S, et al.. Electrochemical drilling with vacuum extraction of electrolyte ［J］. Journal of Materials ProessingTechnology. 2010,210(2): 238-244.

[14] XU X W, CHEN L G, HE W Y, et al.. Design of crescent driving electrode for digital electowetting-on-dielectric devices ［J］. Opt. Precision Eng., 2014, 22(3): 633-640 . (in chinese)

[15] KONG Q C, LI Y, ZHU X G, et al.. Online detection method for inter-electrode gap in micro ECM based on capacitance of electric double layers ［J］. Nanotechnology and Precision Engineering, 2013,11(6): 527- 535. (in Chinese)

[16] YANG G Q, LIAO Y J, YANG J, et al.. Study on a multi-channel micro fluid chip pressure measurement method based on laminar flow distribution ［J］.Chinese Journal of Scientific Instrument, 2012,33(11): 2546-2551. (in chinese)

[17] SHARP K V, ADRIAN R J. Transition from laminar to turbulent flow in liquid filled microtubes ［J］. Experiments in Fluids, 2004,36(5): 741-747.

[18] ZHU X G, HUANG W F, LI Y. Role of step-shape structures and critical failure bubble volume in micro bubble constraint ［J］. Chinese Science Bulletin, 2012,57(22): 2941-2946.

[19] LI Y, JIANG X N, ZHOU ZH Y, et al.. Flow characteristics of fluid in micro-pipeline ［J］. China Mechanical Engineering, 1994,5(3): 24-26. (in Chinese)