• Acta Photonica Sinica
  • Vol. 35, Issue 9, 1412 (2006)
Guo Xiaowei1, Du Jinglei1、*, Luo Boliang1, Guo Yongkang1, and Du Chunlei2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: Cite this Article
    Guo Xiaowei, Du Jinglei, Luo Boliang, Guo Yongkang, Du Chunlei. Imaging Model for DMD-Based Gray-tone Lithography System[J]. Acta Photonica Sinica, 2006, 35(9): 1412 Copy Citation Text show less

    Abstract

    The characteristic of the gray-tone pattern generated by DMD is discussed and an imaging model for describing the digital gray-tone lithography process is developed. In addition,the effects of DMD operation mode and the parameters of imaging system to the distribution of the exposure dose on the photoresist are simulated and discussed. The model will be helpful for the experimental research on the digital lithography.
    Guo Xiaowei, Du Jinglei, Luo Boliang, Guo Yongkang, Du Chunlei. Imaging Model for DMD-Based Gray-tone Lithography System[J]. Acta Photonica Sinica, 2006, 35(9): 1412
    Download Citation