To overcome the adverse effects of environmental humidity changes on structural reading and writing using a micropipette probe, this study designs a double air chamber structure with mixing and working chambers, and evenly distributes the air flow holes in the partitioning in the work chamber to form a uniform micro air flow. The purpose of these designs is to ensure uniform humidity in the micro-nano processing area of the working chamber and reduce the impact of air flow disturbance on the micro-nano working area. Then, the rationality of the double-air chamber structure with mixing and working compartments was verified by numerical simulation. When the working chamber is inflated on both sides with a flow rate of less than 0.06 m·s^-1, airflow disturbance at the working point is less than 50 μm·s^-1. Experiments using homemade experimental equipment demonstrated that the system can maintain the humidity of the working chamber at a given value (ambient temperature 25℃) for a duration of 5 min, with a steady-state error in relative humidity of 2.59%. Comparing the micropipette probe electrodeposition (write) structure quality and scanning (read) imaging quality at different humidities revealed that the environmental humidity control method can meet the work requirements of micropipette probe micro-nano reading and writing. Therefore, the microenvironment humidity control method has important practical significance for improving the stability and reliability of micropipette-based probe micro structure manufacturing and detection.