• Optics and Precision Engineering
  • Vol. 31, Issue 16, 2362 (2023)
Yufan JIA, Xianglong ZHU, Lei YANG, Renke KANG*, and Zhigang DONG
Author Affiliations
  • State Key Laboratory of High-Performance Precision Manufacturing, Dalian University of Technology, Dalian116024, China
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    DOI: 10.37188/OPE.20233116.2362 Cite this Article
    Yufan JIA, Xianglong ZHU, Lei YANG, Renke KANG, Zhigang DONG. Modeling and experimental study on material removal rate of quartz wafer by fixed abrasive lapping[J]. Optics and Precision Engineering, 2023, 31(16): 2362 Copy Citation Text show less
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    Yufan JIA, Xianglong ZHU, Lei YANG, Renke KANG, Zhigang DONG. Modeling and experimental study on material removal rate of quartz wafer by fixed abrasive lapping[J]. Optics and Precision Engineering, 2023, 31(16): 2362
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