• Photonics Research
  • Vol. 13, Issue 5, 1116 (2025)
Hui Li1, Chenhui Zhao2, Wenhui Xu1, Jie Li3..., Chenglong Zheng4, Qi Tan1, Chunyu Song1, Hang Xu1,6,*, Yun Shen2,7,* and Jianquan Yao1,5,8,*|Show fewer author(s)
Author Affiliations
  • 1Key Laboratory of Opto-Electronics Information Technology (Tianjin University), Ministry of Education, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, Tianjin 300072, China
  • 2Department of Physics, School of Physics and Materials Science, Nanchang University, Nanchang 330031, China
  • 3Sichuan Meteorological Optoelectronic Sensor Technology and Application Engineering Research Center, Chengdu University of Information Technology, Chengdu 610225, China
  • 4Key Laboratory of Material Physics, Ministry of Education, School of Physics and Microelectronics, Zhengzhou University, Zhengzhou 450052, China
  • 5Key Laboratory of Photonic-Electronic Integration and Communication-Sensing Convergence (Southwest Jiaotong University), Ministry of Education, Southwest Jiaotong University, Chengdu 610097, China
  • 6e-mail: xh_931119@tju.edu.cn
  • 7e-mail: shenyun@ncu.edu.cn
  • 8e-mail: jqyao@tju.edu.cn
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    DOI: 10.1364/PRJ.554358 Cite this Article Set citation alerts
    Hui Li, Chenhui Zhao, Wenhui Xu, Jie Li, Chenglong Zheng, Qi Tan, Chunyu Song, Hang Xu, Yun Shen, Jianquan Yao, "Twisted bilayer meta-device for on-demand terahertz polarization filtering," Photonics Res. 13, 1116 (2025) Copy Citation Text show less

    Abstract

    Moiré meta-devices facilitate continuous and precise modulation of optical properties through the alteration of the relative alignment, such as twisting, sliding, or rotating of the metasurfaces. This capability renders them particularly suitable for dynamic applications, including zoom optics and adaptive imaging systems. Nevertheless, such designs often sacrifice more complex functionalities, such as polarization manipulation, in favor of simplicity and tunability. Here, we propose and experimentally validate a design strategy for a twisted bilayer metasurface that exhibits both varifocal capabilities and polarization filtering properties. By selecting silicon pillars with polarization-maintaining properties for Layer I and polarization-converting properties for Layer II, the designed Moiré metasurface can become sensitive to specific polarization states. Experimental results demonstrate that the proposed design can generate on-demand terahertz (THz) focused beams, achieving an average focusing efficiency exceeding 35% under x-linearly polarized (x-LP) illumination. This is accomplished by systematically varying the twisting angles p and q of Layer I in relation to Layer II in increments of 30°. Additionally, we provide numerical evidence that the focal length of the transmitted vortex beam can be adjusted using the same approach. The Moiré meta-device platform, which is engineered to modulate optical properties via mechanical twisting, obviates the necessity for external power sources or active materials. This generalized design strategy has the potential to significantly expedite the commercialization of multifunctional metasurfaces, which can produce high-precision optics across various practical applications.

    1. INTRODUCTION

    Unlike bulky traditional optical components, metasurfaces achieve remarkable functionalities in ultrathin and lightweight forms [13]. The definition and function of metasurfaces pertain to two-dimensional (2D) artificial structures composed of subwavelength elements, commonly referred to as meta-atoms [4]. These structures are specifically designed to manipulate electromagnetic (EM) waves with a high degree of precision. By introducing spatially varying amplitude, phase, frequency, and polarization responses at the subwavelength scale, metasurfaces facilitate the engineering of wavefronts, thereby allowing for enhanced control over EM wave propagation [57]. Consequently, metasurfaces can act as polarization-selective filters, allowing or blocking certain polarization states. Plasmonic metasurfaces rely on metallic materials (e.g., gold, silver), which have significant ohmic (resistive) losses, especially in the THz spectral ranges [810]. All-dielectric metasurfaces, on the other hand, use high-refractive-index dielectric materials (e.g., silicon, titanium dioxide) that exhibit negligible absorption losses in the same spectral range. This leads to higher efficiency in wavefront manipulation [1113]. Moreover, the fabrication of all-dielectric metasurfaces is compatible with existing CMOS (complementary metal-oxide-semiconductor) technologies. This compatibility facilitates large-scale and cost-effective production for practical applications, such as beam shaping, orbital angular momentum (OAM) multiplexing [1416], nonlinear optics [1719], and imaging [2022]. Nevertheless, the advancement of compact and on-chip polarization optics has generated an increasing demand for integrated tunable metasurfaces. While tunable metasurfaces integrated with functional materials have been reported, the constraints of static metasurfaces can be addressed through thermal [23], electrical [24], optical [25], and chemical methods [26]. Scaling these processes for commercial production presents significant challenges and may require sophisticated deposition techniques. Additionally, the functional materials utilized in tunable metasurfaces may experience degradation over time due to repeated cycling through various states or extended exposure to external stimuli.

    Recently, Moiré metasurfaces featuring twisted bilayer configurations have emerged as an innovative approach for the dynamic control of the wavefront of EM waves [2733]. Twisted bilayer metasurfaces allow independent engineering of both the individual layers and their mutual alignment. This decoupled design framework enables highly customizable optical functionalities that are not possible with single-layer metasurfaces. Unlike conventional metasurfaces that require active stimuli, Moiré metasurfaces can achieve tunability passively or via mechanical twisting/sliding. This reduces complexity, power consumption, and potential damage from external stimuli. Tsai et al. designed and fabricated a Moiré meta-platform with a center operating frequency of 532 nm, with variable focal length that can be increased from 10 to 125 mm by tuning mutual angles [29]. Zhang et al. reported a Moiré device consisting of two cascaded metasurfaces that can dynamically manipulate the wavefront of THz waves by mutual rotation between the metasurfaces. Both the order of the resulting Bessel beam and its non-diffractive length can be continuously adjusted [28]. Ogawa et al. proposed a design strategy for dynamic EM focusing using twisted metasurfaces. The method combines transmissive and reflective layers in a cascade fashion and achieves precise manipulation of the beam propagation and scanning area from 44.7° to 44.7° by varying the relative angle between the layers [30]. Apparently, the design strategies for Moiré metasurfaces have been greatly developed. However, conventional meta-atoms, such as dielectric or plasmonic resonators, typically emphasize geometric alignment while neglecting birefringent or polarization-sensitive structures. Thus, significant shortcomings remain in the implementation of solutions tailored to achieve customized polarization filtering characteristics.

    In this work, we propose and demonstrate a tunable THz focused beam generator designed for multi-dimensional modulation of the transmitted field. Simultaneous implementation of polarization filtering and adjustable focal length functions is accomplished using two cascaded all-silicon metasurfaces. Polarization-maintaining and polarization-converting meta-atoms were employed to assemble Layer I and Layer II of the proposed design, and labeled as PMMs and PCMs, respectively. By varying the relative twisted angle p between Layer I and Layer II from 90° to 240°, the focal length of the resultant focused beam can be incrementally adjusted from 12 to 4.5 mm, achieving an average focusing efficiency exceeding 35%. Meanwhile, the electric field distribution transmitted by the Moiré meta-device under x-LP illumination is concentrated in the right-handed circularly polarized (RCP) component. After switching the incident direction, by further rotating the twisting angle q of Layer II with respect to Layer I, the focusing field generated under the same conditions can be distributed in the left-handed circularly polarized (LCP) and RCP components as desired. Not only that, but the performance of the Moiré meta-device was also quantitatively evaluated by calculating the absolute percentage error (APE), including the focal length and numerical aperture (NA). The experimental results are in good agreement with the theoretical predictions, exhibiting an average APE of less than 10%. Thus, the Moiré meta-platform to tune optical properties by mechanical twisting eliminates the need for external power sources or active materials, simplifying integration into THz polarization systems.

    2. METASURFACE IMPLEMENTATION

    The proposed design strategy corresponding to the Moiré meta-device contains two layers, which can be defined as Layer I and Layer II, as shown in Fig. 1(a). Here, Layer I primarily functions to manipulate the focal length, whereas Layer II is responsible for the polarization filtering of the proposed design. Moreover, the in-plane rotation angles of Layer I and Layer II are predefined as p and q, respectively, in degrees. Taking a twist angle of p=180° as an example, the encoded phase distributions utilized in the construction of Layer I and Layer II are depicted in Fig. 1(b). By varying the parameter p from 0° to 360°, the intensity of the transmitted electric field generated by the proposed Moiré meta-device under x-LP illumination is concentrated in the RCP component, as illustrated in the first row of Fig. 1(c). By reversing the direction of illumination of the incident x-LP, the normalized intensity of the transmitted electric field is distributed in the RCP and LCP components as desired, specifically, IRCP=(cosq+1)/2 and ILCP=(sinq+1)/2. This distribution occurs as the relative rotation angle of Layer II with respect to Layer I increases from 0° to 360°, as illustrated in the second row of Fig. 1(c). Meanwhile, the theoretical values of the focal lengths for the focused beams generated within the RCP and LCP channels, as a function of the relative rotation angles p or q, are presented in Fig. 1(d). It is evident that the theoretical predictions indicate a gradual decrease in the focal length as the parameter p or q increases, demonstrating polarization-insensitive properties.

    Schematic representation of the twisted bilayer metasurfaces. (a) The proposed design is divided into two layers: Layer I and Layer II. Layer I comprises silicon pillars that exhibit polarization-maintaining properties, while Layer II consists of silicon pillars with polarization-converting capabilities. (b) Encoding phase profiles utilized in the construction of Layer I and Layer II. (c) Normalized intensity of LCP and RCP components acquired under x-LP illumination by varying the relative rotation angles p and q between Layer I and Layer II. (d) Calculated focal lengths of the generated focused beams within the LCP and RCP channels as a function of relative rotation angles p and q.

    Figure 1.Schematic representation of the twisted bilayer metasurfaces. (a) The proposed design is divided into two layers: Layer I and Layer II. Layer I comprises silicon pillars that exhibit polarization-maintaining properties, while Layer II consists of silicon pillars with polarization-converting capabilities. (b) Encoding phase profiles utilized in the construction of Layer I and Layer II. (c) Normalized intensity of LCP and RCP components acquired under x-LP illumination by varying the relative rotation angles p and q between Layer I and Layer II. (d) Calculated focal lengths of the generated focused beams within the LCP and RCP channels as a function of relative rotation angles p and q.

    This configuration facilitates multi-dimensional joint tuning with tailored focusing characteristics. Thus, a set of polarization-maintaining meta-atoms (PMMs) possessing the same phase delays can be used to assemble Layer I, as illustrated in Fig. 2(a). The silicon pillars, arranged in a cylindrical configuration, exhibit a period P=150 μm and a height H=200 μm. Moreover, the substrate is also composed of silicon and has a thickness of 300 μm. By systematically varying the radius parameter R in the time-domain solver, the amplitudes of the selected meta-atoms that satisfy the phase encoding criteria are illustrated in Fig. 2(b). The selected units exhibit consistent and relatively uniform transmission amplitudes in both the x- and y-directions. This observation includes the co-polarization coefficients txx and tyy, as well as a relative amplitude ratio of txx/tyy. The phase distribution at 45° intervals is depicted in Fig. 2(c). Additionally, the phase differences (PDs) calculated along the x- and y-directions further demonstrate the polarization-insensitive properties of the PMM. Moiré metasurfaces with twisted bilayer configurations introduce a second degree of freedom, which is relative angular displacement, offering distinct advantages over conventional tunable metasurfaces. Theoretically, the encoding phase profile Φ1(r,p0) for generating Layer I can be expressed as [29,34,35] Φ1(r,p0p)=round(r2λ·f0)·(p0p).

    Characterization of the fundamental units utilized in the assembly of Layer I and Layer II. (a) Cylindrical silicon pillars exhibiting polarization-maintaining properties are designated as PMMs. By varying the parameter R, eight elements that meet the specified phase requirements are selected at intervals of π/4, corresponding to (b) amplitudes and (c) phase delays. (d) The normalized magnetic field distributions (H-fields) obtained from the time domain solver for a PMM with periodic boundary conditions. (e) Rectangular silicon pillars exhibiting polarization-converting properties are designated as PCMs. By varying the parameters L and W, eight elements that meet the desired phase requirements are selected at intervals of π/4, corresponding to (f) amplitudes and (g) phase delays. (h) The normalized magnetic field distributions (H-fields) obtained from the time domain solver for a PCM with periodic boundary conditions.

    Figure 2.Characterization of the fundamental units utilized in the assembly of Layer I and Layer II. (a) Cylindrical silicon pillars exhibiting polarization-maintaining properties are designated as PMMs. By varying the parameter R, eight elements that meet the specified phase requirements are selected at intervals of π/4, corresponding to (b) amplitudes and (c) phase delays. (d) The normalized magnetic field distributions (H-fields) obtained from the time domain solver for a PMM with periodic boundary conditions. (e) Rectangular silicon pillars exhibiting polarization-converting properties are designated as PCMs. By varying the parameters L and W, eight elements that meet the desired phase requirements are selected at intervals of π/4, corresponding to (f) amplitudes and (g) phase delays. (h) The normalized magnetic field distributions (H-fields) obtained from the time domain solver for a PCM with periodic boundary conditions.

    Here, r represents the radial coordinate at the metasurface, p0 denotes the relative rotation angle between Layer I and Layer II, λ=375  μm indicates the central operating wavelength, f0=6  mm is the initial focal length at p0=180°, and the round () function is implemented to avoid the fanning effect of the Moiré meta-device during the rotation process. Subsequently, the normalized magnetic field intensity distribution of the PMM was extracted under periodic boundary conditions, as shown in Fig. 2(d). The EM energy carried by the incident plane wave is mainly localized inside the dielectric pillars with a high refractive index (3.45). On the other hand, the meta-atoms for assembling Layer II were selected by engineering rectangular silicon pillars that exhibit shape birefringence properties, as illustrated in Fig. 2(e). Then, such a set of units with EM properties similar to the quarter-wave plates (QWPs) can be defined as polarization-converting meta-atoms (PCMs). The period and pillar height of the PCM with an all-silicon configuration were consistent with that of the PMM. This design choice ensures consistency in the overall metasurface structure and allows for a fair comparison between the two types of pillars in terms of their optical performance. Consequently, the Jones matrix of PCMs in a linearly polarized basis can be represented as [3639] T0=[|txx|eiφxx00|tyy|eiφyy],where |txx| (φxx) and |tyy| (φyy) denote the amplitudes (phase delays) under orthogonal linearly polarized illumination, and T0 is the transmitted Jones matrix of a PCM. By introducing an additional rotation factor ϕ, the transmission matrix T0 can be further calculated using the standard transformation matrix Λ1=[cosϕsinϕsinϕcosϕ] as follows: T1=Λ1TΛ11=[cos2ϕ·|txx|eiφxx+sin2ϕ·|tyy|eiφyysinϕcosϕ·(|txx|eiφxx|tyy|eiφyy)sinϕcosϕ·(|txx|eiφxx|tyy|eiφyy)sin2ϕ·|txx|eiφxx+cos2ϕ·|tyy|eiφyy],where T1 denotes the transmission matrix of the PCM after rotation. Equation (3) can be further simplified by applying the parametric conditions met by the QWP in a linearly polarized basis to Eq. (3), specifically: ϕ=π/4, |txx|=|tyy|=t, and φyyφxx=π/2. Equation (3) can be further calculated as T1=t2eiφxx[1+eiπ21eiπ21eiπ21+eiπ2]=2t2ei(φxx+π4)[1ii1].

    In this case, the transmission matrix produced by a PCM with periodic boundary conditions under x-LP illumination can be described as E1=2t2eiφxx[1ii1][10]=2t2eiφxx[1i].

    Note that PCMs that satisfy specific parametric conditions can efficiently achieve the conversion from a linearly polarized state to a single-handed circularly polarized state. Subsequently, such a PCM can realize advanced wavefront shaping with the assistance of the propagation phase. In the simulation, the x- and y-directions along the dielectric pillars are set as periodic boundary conditions, while the z-direction is set as an open boundary condition. The amplitude and phase delays produced by the selected meta-atoms under x-LP illumination are shown in Figs. 2(f) and 2(g). When the in-plane orientation angle of the rectangular pillar is fixed at π/4, the amplitudes extracted in both the co-polarized and cross-polarized channels are approximately 0.6, i.e., txxtyy0.6. Furthermore, as the meta-atom numbering increases, the phase delays in the transmission mode not only achieve full-phase modulation of 2π but also maintain a consistent PD (i.e., φxxφyyπ/2) at the target frequency of 0.9 THz. In addition, Fig. 2(h) illustrates the normalized magnetic field distributions obtained from the time domain solver for a PCM with periodic boundary conditions. In this analysis, we focus on two adjacent pillars as a representative example. The distribution of incident EM energy predominantly occurs within the pillars that possess a high refractive index. This observation suggests that the coupling effects between neighboring dielectric pillars can be considered negligible. Thus, the target phase distribution Φ2(r,p0) for generating Layer II can be described as Φ2(r,p0)=round(r2λ·f0)·p0.

    Here, setting a=1/(λ·f0) serves as a crucial factor for modulating the focal length, and we define a variable, denoted as p[0,2π], to facilitate the manipulation of the Moiré metasurface rotation, employing a step size of 30°. Further, the functional relationship between the focal length fp of the focused beam produced in the transmission mode and the rotation angle p can be expressed as fp=πa·p·λ.

    Obviously, the angle of the designed Moiré metalens can be continuously tuned by varying the relative rotation angle p between Layer I and Layer II. Thus, the numerical aperture (NA) of the designed Moiré meta-device can be calculated from the ideal focal length as [40] NA=sin(arctanL2fp),where L denotes the diameter of the metasurface. The calculated NA can effectively evaluate the transmission properties of the designed Moiré metasurfaces. The geometric parameters corresponding to PMM and PCM can be found in Appendix A.

    3. RESULTS AND DISCUSSION

    The coded phase profiles for generating Layer I are indicated in Fig. 3(a), arranged pixel by pixel from the selected PCMs for performing the function of polarization filtering. Figure 3(b) illustrates the coded phase distributions employed in the construction of Layer II, which correspond to the mutual rotation angles p=90°, 120°, 150°, 180°, 210°, and 240°. Therefore, the total modulation phase of the designed Moiré metasurface can be calculated as Φtot(r,p)=Φ1(r,p0p)+Φ2(r,p0)=ar2p [29]. Figure 3(c) illustrates the joint phase distribution corresponding to different rotation angles, presenting typical focusing phase profiles with different focal lengths. The electric field distribution of the metasurface under x-LP illumination was obtained by using the finite integration technology (FIT) in the time-domain solver, as shown in Fig. 3(d). According to Eq. (5), Layer II is composed of PCMs that adhere to the propagating phase gradient. This design facilitates the conversion of x-linearly polarized states into single-handed circularly polarized states. Thus, the electric field intensity distributions extracted from the RCP channels within the xoz plane are shown in Fig. 3(d). As the rotation angle p gradually increases from 90° to 240°, the focal length of the transmitted beam decreases from 9.4 to 3.9 mm. Figures 3(e) and 3(f) present the distribution of the monitored electric field intensity in the xoy plane, including the RCP and LCP components, respectively. Obviously, the Moiré meta-device effectively converts incident x-polarization into the RCP component while facilitating zoom capabilities. This indicates that the proposed design strategy utilizing twisted bilayer metasurfaces can concurrently achieve multi-dimensional modulation of both focal length and polarization state. In fact, the proposed design generated by the PCM- and PMM-based assembly strategies, also known as polarization-sensitive Moiré meta-device [16,31,41], exhibits broadband operational characteristics in proximity to the central frequency, as illustrated in Fig. 3(g). Taking p=120° as an example, the focal length of the transmitted beam gradually increases from 6.22 to 7.92 mm as the operating frequency increases from 0.65 to 0.95 THz. Once the frequency is shifted, the focusing efficiency obtained at the corresponding focal plane is reduced, which is shown in the cyan dotted line in Fig. 3(g). Here, the focusing efficiency with quantitative analytical properties is defined as the ratio of the power at the focal spot to the incident power, which can be written as ηf=Pf/Pin=Ef(EfEmax/e)/Ef [42]. Here, Pf denotes the integral of the focused field distribution over a range greater than Emax/e, and Pin denotes the integral of the field distribution at the entire focal plane. Subsequently, Fig. 3(h) presents a comparison of the intensity of individual polarized components generated by the proposed design under arbitrarily polarized illumination. In this figure, the horizontal axis represents the polarization components, while the vertical axis denotes the incident polarization states. It is not surprising that the polarization conversion behavior is reversible and that the resulting polarization states are distinct.

    Simulation results obtained in the time domain solver by varying the twist angle p of Layer I with respect to Layer II. (a) Encoding phase profiles for Layer I. (b) Encoding phase profiles for Layer II, corresponding to p=90°, 120°, 150°, 180°, 210°, and 240°. (c) Joint phase modulation profiles through paired metasurfaces. Based on the simulations, the evaluated focal length related to different mutual rotation angles p=90°, 120°, 150°, 180°, 210°, 240°, are 9.4 mm, 7.1 mm, 5.6 mm, 4.8 mm, 4.1 mm, and 3.9 mm, respectively. (d) The electric field distribution corresponding to the RCP component is captured in the xoz plane by using a field monitor. The electric field distribution, including the (e) RCP and (f) LCP components, was captured in the xoy plane utilizing a field monitor. (g) The focal lengths and focusing efficiencies of the Moiré metasurfaces were calculated across a broadband range of 0.65–0.95 THz, taking p=120° as an example. (h) A color map with reversible polarization conversion properties, where different colors correspond to different polarization conversion intensities.

    Figure 3.Simulation results obtained in the time domain solver by varying the twist angle p of Layer I with respect to Layer II. (a) Encoding phase profiles for Layer I. (b) Encoding phase profiles for Layer II, corresponding to p=90°, 120°, 150°, 180°, 210°, and 240°. (c) Joint phase modulation profiles through paired metasurfaces. Based on the simulations, the evaluated focal length related to different mutual rotation angles p=90°, 120°, 150°, 180°, 210°, 240°, are 9.4 mm, 7.1 mm, 5.6 mm, 4.8 mm, 4.1 mm, and 3.9 mm, respectively. (d) The electric field distribution corresponding to the RCP component is captured in the xoz plane by using a field monitor. The electric field distribution, including the (e) RCP and (f) LCP components, was captured in the xoy plane utilizing a field monitor. (g) The focal lengths and focusing efficiencies of the Moiré metasurfaces were calculated across a broadband range of 0.65–0.95 THz, taking p=120° as an example. (h) A color map with reversible polarization conversion properties, where different colors correspond to different polarization conversion intensities.

    Such Moiré meta-platforms, including Layer I and Layer II, were prepared using standard ultraviolet (UV) lithography and inductively coupled plasma (ICP) etching techniques. Figure 4(a) depicts the overall appearance of Layer I, which measures 1.4  cm×1.4  cm and comprises a total of 80×80 PMMs. By analyzing the scanning electron micrographs (SEMs) of Layer I (see the first row of Fig. 4), the fabricated samples exhibited good fabrication accuracy. The SEM images of Layer II were obtained under identical preparation conditions. The included PCMs exhibited smooth surfaces and steep sidewalls, indicating a high level of fabrication accuracy. The performance of the proposed Moiré meta-device was evaluated by employing a probe-based near-field THz imaging system (Model TeraCube Scientific M2) along the longitudinal direction, as shown in Fig. 4(c). The optical path of the THz polarization imaging system is illustrated in Fig. 4(c). This system utilizes a femtosecond laser source characterized by a central wavelength of 780 nm, a pulse width of 100 fs, and a repetition frequency of 80 MHz [43,44]. The microprobe exhibits a spatial resolution of 60 μm and is capable of recording the complex amplitude at the focal plane on a pixel-by-pixel basis. Since the designed twisted bilayer metasurface is mechanically rotated to control the focal length of the transmitted beam, a critical point is the alignment of the two metasurfaces. As shown in Fig. 4(d), strict alignment between Layer I and Layer II is ensured by introducing an optical tool of model GCT-090101. The GCT-090101 tool is equipped with four through holes, each measuring 6 mm in diameter, designed to accommodate the GCT-01 series coaxial stubs. Additionally, this optical component incorporates a built-in 360° rotating dial with an accuracy of 2°. As shown in Fig. 4(d), optical components GCT-090101-1 and GCT-090101-2 with two samples mounted were placed coaxially in the optical path [28]. Moreover, the selection of distance between two layers depends on the phase gradient of the previous one. In other words, a greater phase gradient necessitates a shorter distance. To minimize the coupling between the twisted bilayer metasurfaces, the distance between Layer I and Layer II was maintained at 1.5 wavelengths during this measurement.

    Experimental characterization of the proposed Moiré metasurface. (a) SEM images of the fabricated Layer I under top and tilted view. (b) SEM images of the fabricated Layer II under top and tilted view. Scale bar: 1 and 0.5 mm. (c) The electric field distribution at different focal planes was recorded pixel by pixel using a microprobe-based near-field THz imaging system. (d) Optical components for assembling cascade metasurfaces, model GCT-090101.

    Figure 4.Experimental characterization of the proposed Moiré metasurface. (a) SEM images of the fabricated Layer I under top and tilted view. (b) SEM images of the fabricated Layer II under top and tilted view. Scale bar: 1 and 0.5 mm. (c) The electric field distribution at different focal planes was recorded pixel by pixel using a microprobe-based near-field THz imaging system. (d) Optical components for assembling cascade metasurfaces, model GCT-090101.

    The simulation and experimental results produced by the proposed THz Moiré metalens under x-LP illumination are represented in Fig. 5, further illustrating the feasibility of this design. As shown in Fig. 5(a), the normalized amplitudes of the electric field distribution were extracted along the longitudinal direction in the xoz plane, corresponding to p=90°, 120°, 150°, 180°, 210°, and 240°. Apparently, the peak of the normalized amplitude obtained in the RCP component is gradually red-shifted as the rotation angle is gradually increased. This means that the focal length of the focused beam produced in the transmission mode gradually decreases. Subsequently, the focused field distribution at the corresponding focal plane was obtained using a THz near-field scanning system equipped with a microprobe, as shown in Fig. 5(b). The electric field distribution obtained is basically consistent with the simulation results, as depicted in Fig. 4(e). To quantitatively analyze the performance of the proposed Moiré meta-device, the normalized amplitude curves in the xoy plane were extracted along the horizontal direction, as illustrated in Fig. 5(c). In this figure, the red solid line represents the experimental results, while the cyan solid line denotes the simulation results. Despite a minor discrepancy between the measured and simulated results—potentially attributable to an inaccurate twist angle—the resulting beam quality aligns with the anticipated coding requirements. The focal lengths of the Moiré metasurfaces as a function of the mutual rotation angle p are indicated in Fig. 5(d). The results of the correlational study on focal length and twisted angle demonstrate a negative correlation between these two variables. Another parameter used to evaluate the focusing performance is the numerical aperture (NA), as defined in Eq. (8). Since the numerical aperture is inversely related to focal length, the NA values derived from theoretical, simulating, and experimental methods demonstrate a positive correlation with the rotation angle, as shown in Fig. 5(e). Subsequently, the definition of the absolute percentage error (APE=|FexpFsim|/Fsim) parameter further assesses the errors generated during the rotation process [45], as illustrated in Fig. 5(f). The findings indicate that as the angle of rotation increases, corresponding to the focal length, the maximum error observed in this experiment occurs at q=150°, measuring only 9.9%. The maximum APE recorded in the experiment was 6.45%, while the average APE was found to be less than 4%. Based on the calculations, the measured focusing efficiencies related to different rotation angles q=60°, 90°, 120°, 150°, 180°, 210°, 240°, and 270° are 48.11%, 46.05%, 46.41%, 41.99%, 39.38%, 33.15%, 27.19%, and 19.37%, respectively. The comparison clearly indicates that the simulation results align closely with the experimental findings.

    Experimental results obtained by varying the mutual rotation angle p from 90° to 240°. (a) Normalized electric field intensity extracted along the z-direction in the xoz plane. (b) The experimental field-intensity distributions obtained from measurements on the z=9.2 mm, 7.2 mm, 5.1 mm, 4.7 mm, 3.8 mm, and 3.5 mm planes correspond to the RCP component in the transmission mode. (c) Normalized electric field intensity extracted along the x-direction in the xoy plane, including simulation and experimental results. Theoretical, simulated, and experimental results of Moiré metasurfaces at different rotation angles, including (d) focal length and (e) NA. (f) Focusing efficiency and APE parameters of Moiré metasurfaces under x-LP illumination.

    Figure 5.Experimental results obtained by varying the mutual rotation angle p from 90° to 240°. (a) Normalized electric field intensity extracted along the z-direction in the xoz plane. (b) The experimental field-intensity distributions obtained from measurements on the z=9.2  mm, 7.2 mm, 5.1 mm, 4.7 mm, 3.8 mm, and 3.5 mm planes correspond to the RCP component in the transmission mode. (c) Normalized electric field intensity extracted along the x-direction in the xoy plane, including simulation and experimental results. Theoretical, simulated, and experimental results of Moiré metasurfaces at different rotation angles, including (d) focal length and (e) NA. (f) Focusing efficiency and APE parameters of Moiré metasurfaces under x-LP illumination.

    To further demonstrate the versatility of the proposed Moiré metalens in simultaneously manipulating polarization and focal length, experimental results corresponding to various twist angles were acquired by rotating Layer II. It is worth noting that the generation with a tailored focused field distribution requires a change in the direction of incidence. In other words, by fixing the position of Layer I, the desired function is realized by continuously tuning the parameter q. Subsequently, Layer II is considered as a whole and an additional rotation factor q is introduced to simultaneously change the polarization state and the focal length of the transmitted beam. Layer II is composed of PCMs exhibiting specific polarization conversion characteristics. When Layer II is rotated collectively, each PCM will rotate correspondingly. Consequently, the transmitted Jones matrix can be further evaluated as [46] T2=Λ2T1Λ21=2tei(φxx+π4)2(cos2q+sin2q)([sinq(sinq+icosq)sinq(cosq+isinq)sinq(cosqisinq)sinq(sinq+icosq)]+[cosq(cosq+isinq)cosq(sinq+icosq)cosq(sinq+icosq)cosq(cosqisinq)]),where Λ2=[cosqsinqsinqcosq] denotes the standard 2×2 rotation matrix. Then, the transmission matrix of the rotated Moiré device under x-LP illumination can be described as E2=T2[10]=2tei(φxx+π4)2(cos2q+sin2q)([sinq(sinq+icosq)+cosq(cosq+isinq)sinq(cosqisinq)cosq(sinq+icosq)]).

    For simplicity, some eigenvalues are selected to further characterize the trend of the acquired focusing intensity in the LCP and RCP channels with the rotation angle q, and detailed calculations are available in Appendix B. The results indicate that the intensity of the RCP component of the transmitted electric field will experience a sequential evolution process of 12/202/212/20, while the theoretical intensity of the LCP component will also experience a continuous evolutionary process of 02/212/202/21 [47]. As the rotation angle q was gradually increased from 90° to 240°, the RCP and LCP components of the electric field were recorded pixel by pixel at the corresponding focal planes, as shown in Figs. 6(a) and 6(b). The measured results obtained from the near-field THz scanning system generally align with the simulation results. It is noteworthy that the RCP and LCP components derived from the time-domain solver are detailed in Appendix C. The captured normalized electric field intensity as a function of rotation angle is shown in Fig. 6(c). The comparison reveals a strong alignment among the theoretical analysis, simulations, and experimental results, thereby affirming the consistency and reliability of the findings. The focal length and NA obtained from simulations and experiments are presented in Figs. 6(d) and 6(e), respectively. Consistent with expectations, the focal length exhibits a decreasing trend, while the NA shows an increasing trend as the rotation angle increases. Moreover, the obtained experimental and simulated results are in good agreement. To quantitatively analyze the performance of the transmitted beam, the APE parameters related to the focal length and NA are presented in Fig. 6(f). The average APE observed during the experiment was calculated to be 3.65% for the focal length and 2.15% for the NA.

    Experimental results obtained by varying the mutual rotation angle q from 90° to 240°. The experimental field-intensity distributions obtained from measurements on the z=8.9 mm, 6.8 mm, 5.5 mm, 4.3 mm, 3.8 mm, and 3.6 mm planes correspond to the (a) RCP and (b) LCP components in the transmission mode. (c) Comparison of the intensities of the normalized electric field generated by such Moiré metasurfaces at different rotation angles, including theoretical, simulated, and experimental results for the RCP and LCP components. Theoretical, simulated, and experimental results of Moiré metasurfaces at different rotation angles, including (d) focal length and (e) NA. (f) The APE parameters of Moiré metasurfaces under x-LP illumination.

    Figure 6.Experimental results obtained by varying the mutual rotation angle q from 90° to 240°. The experimental field-intensity distributions obtained from measurements on the z=8.9  mm, 6.8 mm, 5.5 mm, 4.3 mm, 3.8 mm, and 3.6 mm planes correspond to the (a) RCP and (b) LCP components in the transmission mode. (c) Comparison of the intensities of the normalized electric field generated by such Moiré metasurfaces at different rotation angles, including theoretical, simulated, and experimental results for the RCP and LCP components. Theoretical, simulated, and experimental results of Moiré metasurfaces at different rotation angles, including (d) focal length and (e) NA. (f) The APE parameters of Moiré metasurfaces under x-LP illumination.

    The fundamental mechanism of the proposed twisted bilayer metasurface utilizes PMMs for Layer I and PCMs for Layer II. This configuration enables simultaneous modulation of polarization state and focal length. In other words, this design strategy is applicable universally, regardless of the operating band or the beam type. The generation of vortex beams with variable focal lengths was further evaluated by changing the encoded phase profile of Layer II, as shown in Fig. 7. The coded phase distribution utilized for generating OAM can be described as Φ3(r,θ0,ϕ)=round(r2λ·f0)·θ0+l·ϕ,where l·ϕ corresponds to the wavefront of a flat spiral, and l=1 denotes the number of topological charges carried by the transmitted beam. Subsequently, the generated Layer II carrying the OAM was replaced with the previous one, and the transmissive vortex field distribution was obtained by rotating Layer I in the time-domain solver. As the rotation angle p is gradually increased from 90° to 180°, the joint phase distribution used to generate the focused vortex beam can be found in Appendix D. As a result, the electric field intensity distribution generated by this Moiré device under x-LP illumination is mainly concentrated in the RCP component, as shown in Figs. 7(a) and 7(b). The RCP components extracted in the xoz plane using the field monitor, corresponding to the field distribution of the proposed twisted bilayer metasurface under x-LP illumination, are given in Appendix D. The electric field and phase distributions of the LCP components are indicated in Figs. 7(c) and 7(d), further elucidating the working mechanism of this design. Based on the simulations, the focal lengths related to different mutual rotation angles p=90°, 120°, 150°, 180°, are 9.0 mm, 6.9 mm, 5.6 mm, and 4.6 mm, respectively. Obviously, the focal lengths are shown as a function of the rotation angles, which is in qualitative agreement with theoretical predictions, as shown in Fig. 7(e). Not only that, but the NA obtained from the numerical calculations also meets the expected design requirements. The quality of the vortex beam is demonstrated through the focusing efficiency, as depicted in Fig. 7(f). As the rotation angle p increases, the focusing efficiency exhibits a declining trend, with an average value of approximately 40%. The comparison shows that the theoretical analysis and simulation results are in good agreement, thus verifying the reliability of the findings.

    Numerical simulation results obtained by varying the mutual rotation angle p from 90° to 180°. The electric field and phase distributions collected in the xoy plane using the field monitor in the time-domain solver, corresponding to the (a), (b) RCP component and (c), (d) LCP component, respectively. (e) Simulated and theoretical focal length and NA of Moiré metalens (at λ=333 μm) at different relative rotation angles. (f) Focusing efficiency of the RCP component corresponding to different rotation angles.

    Figure 7.Numerical simulation results obtained by varying the mutual rotation angle p from 90° to 180°. The electric field and phase distributions collected in the xoy plane using the field monitor in the time-domain solver, corresponding to the (a), (b) RCP component and (c), (d) LCP component, respectively. (e) Simulated and theoretical focal length and NA of Moiré metalens (at λ=333  μm) at different relative rotation angles. (f) Focusing efficiency of the RCP component corresponding to different rotation angles.

    4. CONCLUSIONS

    In conclusion, we propose and experimentally validate a design strategy for a twisted bilayer meta-device that facilitates the simultaneous manipulation of polarization state and focal lengths through cascading techniques. By selecting PMMs and PCMs with distinct polarization properties for the construction of Layer I and Layer II, respectively, the degrees of freedom for modulation of the Moiré meta-device can be significantly enhanced. The proposed design strategy presents a generalized design framework capable of effectively reducing the generation of aberrations, while achieving adjustable focal lengths and wavefront shaping. This is accomplished through a compact and lightweight structure that does not require external interventions. By varying the rotation angle, p, of Layer I relative to Layer II within the range of 90° to 240°, the transmitted electric field generated by the designed Moiré meta-device under x-LP illumination is predominantly concentrated in the RCP component. Simultaneously, the average focusing efficiency of the transmitted beam exceeded 35%, with experimental errors assessed through the APE parameters. The generation of a varifocal THz focused beam exhibiting customized polarization conversion behavior is further demonstrated through the variation of the incident direction. Experimental results indicate that the intensity and focal length of the transmitted beam in both the LCP and RCP components can be actively modulated by varying the twisting angle q of Layer II with respect to Layer I. Furthermore, these experimental findings are in good agreement with the simulation and theoretical predictions. In addition, the numerical results proved that the focal length and polarization of the generated THz vortex beam can also be flexibly controlled by the designed cascading strategy. This investigation has the potential to offer a comprehensive and dynamic solution for adaptive optics systems, with broad applications in laser processing, long-range optical quantum communications, and high-resolution imaging.

    APPENDIX A

    The geometric parameters of the PMMs and PCMs were utilized to construct Layer I and Layer II, respectively. The structural parameters of the PMM were calculated and optimized by using the time-domain solver of the commercially available simulation software CST Microwave Studio, as shown in Table 1. The selected PMM successfully achieves complete phase modulation of 2π at intervals of π/4, demonstrating polarization-insensitive characteristics. Furthermore, the average amplitude of the selected PMM is approximately 0.7. The geometrical parameters corresponding to the selected PCMs are then indicated in Table 2. The birefringent property possessed by the PCM enables complete phase modulation with a constant phase difference, i.e., φxxφyy=π/2, in the x- and y-directions.

    Selected Structural Parameters Corresponding to PMMs

    r(μm)49626974788390104
    φxx89.87°46.23°−2.28°−46.25°−89.54°−136.03°−176.38°134.28°
    φyy89.82°46.15°−2.38°−46.26°−89.55°−135.95°−176.28°134.28°
    txx0.730.730.650.680.750.750.710.68
    tyy0.730.730.650.680.750.750.710.68

    Selected Structural Parameters Corresponding to PCMs

    L  (μm)3979777670727177
    W  (μm)11665615552494129
    φxx−278.25°−221.42°−172.68°−132.34°−89.67°−45.11°1.61°44.88°
    φyy−182.21°−130.61°−90.14°−48.18°2.96°45.36°86.91°133.64°
    txx0.610.620.560.620.600.560.570.59
    tyy0.560.610.590.620.570.610.590.58

    APPENDIX B

    The derivation procedure for the Jones matrix corresponding to different eigenvalues is described when the rotation angle of Layer II relative to Layer I is denoted as q. Considering Layer II as a whole, its transmissive Jones matrix under x-polarized illumination can be characterized by Eq. (10). For q=0°, 180°, and 360°, the transmission matrix E2 can be described as E2=2t2ei(φxx+π4)[1i].

    For q=45° and 225°, the transmission matrix E2 can be described as E2=2t2ei(φxx+π4)(1+i)[10]=2t(1+i)2ei(φxx+π4)([1i]+[1i]).

    For q=90° and 270°, the transmission matrix E2 can be described as E2=2t2ei(φxx+π4)[1i].

    For q=135° and 315°, the transmission matrix E2 can be described as E2=2t2ei(φxx+π4)(1i)[10]=2t(1i)2ei(φxx+π4)([1i]+[1i]).

    The results indicate that the intensity of the RCP component of the transmitted electric field will experience a sequential evolution process of 12/202/212/20, while the theoretical intensity of the LCP component will also experience a continuous evolutionary process of 02/212/202/21.

    APPENDIX C

    Simulation results of the focused field produced by the designed Moiré surface under x-polarized illumination are described in the appendix as the mutual rotation angle q is gradually increased from 90° to 240°. Numerical simulation of the designed Moiré meta-lens was also performed using the time-domain solver of the commercial software CST Microwave Studio. In the simulation, the x-, y-, and z-directions along the meta-platform are set as open boundary conditions. Layer II is composed of PCMs exhibiting specific polarization conversion characteristics, and can be considered as a whole with an additional rotation factor q. A rigorous analysis of the Jones matrix indicates that the RCP and LCP components of the transmitted electric field intensity, produced during the rotation of Layer II, will exhibit evolutionary patterns analogous to those of cosine and sine functions, respectively. In other words, both the focal length and the transmitted polarization state of the Moiré surface under x-LP illumination can be tailored. The RCP and LCP components of the transmitted electric field generated when the rotation angle q of Layer II relative to Layer I is gradually increased from 90° to 240° are indicated in Figs. 8(a) and 8(b), respectively. It can be found that the focal length of the focused beam gradually decreases from 9.4 to 3.7 mm. In order to quantitatively analyze the intensity variation trends of the RCP and LCP components generated during rotation, the normalized intensity profiles extracted along the x-direction, corresponding to 90°, 120°, 150°, 180°, 210°, and 240°, are indicated in Fig. 8(c). Here, the red and blue solid lines correspond to the LCP and RCP components, respectively.

    Simulation results of the focused field produced by the designed Moiré surface under x-LP illumination as the mutual rotation angle q is gradually increased from 90° to 240°, including (a) RCP and (b) LCP components. (c) The normalized intensity profiles extracted along the x-direction, corresponding to 90°, 120°, 150°, 180°, 210°, and 240°.

    Figure 8.Simulation results of the focused field produced by the designed Moiré surface under x-LP illumination as the mutual rotation angle q is gradually increased from 90° to 240°, including (a) RCP and (b) LCP components. (c) The normalized intensity profiles extracted along the x-direction, corresponding to 90°, 120°, 150°, 180°, 210°, and 240°.

    APPENDIX D

    This section introduces the THz vortex beam generator simultaneously acquring polarization filtering and varifocal characteristics. The generated Layer II carrying the OAM was replaced with the previous one, and the transmissive vortex field distribution was obtained by rotating Layer I in the time-domain solver. Subsequently, the phase distributions corresponding to q=90°, 120°, 150°, and 180° are indicated in Figs. 9(a), 9(b), 9(c), and 9(d), respectively. In addition, the electric field distributions generated in the xoz plane by the Moiré surfaces carrying orbital angular momentum (OAM) are shown in Fig. 9(e), corresponding to the RCP components at z=9.0  mm, 6.9 mm, 5.6 mm, and 4.6 mm, respectively.

    THz vortex beam generator with simultaneous polarization filtering and varifocal characteristics. The phase distributions obtained by setting the rotation angle of Layer I with respect to Layer II, q, as (a) 90°, (b) 120°, (c) 150°, and (d) 180°. (e) Electric field distribution of the RCP component collected in the xoz plane.

    Figure 9.THz vortex beam generator with simultaneous polarization filtering and varifocal characteristics. The phase distributions obtained by setting the rotation angle of Layer I with respect to Layer II, q, as (a) 90°, (b) 120°, (c) 150°, and (d) 180°. (e) Electric field distribution of the RCP component collected in the xoz plane.

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