Texturization and rounded process of silicon wafers for heterojunction with intrinsic thin-layer solar cells

KunpengMA; Xiangbin ZENG; Qingsong LEI; Junming XUE; Yanzeng WANG; Chenguang ZHAO

doi:10.1007/s12200-013-0386-y

[1] Green M A. Solar Cells : Operating Principles, Technology and System Applications. New Jersey: Prentice-Hall Inc., 1982

[2] De Wolf S, Descoeudres A, Holman Z C, Ballif C. High-efficiency silicon heterojunction solar cells: a review. Green, 2012, 2(1): 7-24

[3] Fuhs W, Niemann K, Stuke J. Heterojunctions of amorphous silicon and silicon single crystals. In: Proceedings of AIP Conference, New York: AIP Publishing, 1974, 20: 345-350

[4] Taguchi M, Tanaka M, Matsuyama T, Tsuda S, Nakano S, Kishi Y, Kuwano Y. Improvement of the conversion efficiency of polycrystalline silicon thin film solar cell. In: Proceedings of Technical Digest of the 5th International Photovoltaic Science and Engineering Conference, Kyoto: International PVSEC. 1990, 689-692

[5] Taguchi M, Yano A, Tohoda S, Matsuyama K, Nakamura Y, Nishiwaki T, Fujita K, Maruyama E. 24.7% record efficiency HIT solar cell on thin silicon wafer. IEEE Journal of Photovoltaics, 2013, PP(99): 1-4

[6] Barrio R, Gonzalez N, Carabe J, Gandia J J. Optimisation of NaOH texturisation process of silicon wafers for heterojunction solar-cells applications. Solar Energy, 2012, 86(3): 845-854

[7] Tian J T, Feng S M, Wang K X, Xu H T, Yang S Q, Liu F, Huang J H, Pei Y. The influence of new additive in alkaline solution on the shape of pyramid on the monocrystal Si surface. Acta Physica Sinica, 2012, 61(6): 066803-1-066803-5 (in Chinese)

[8] Kashkoush I, Chen G, Nemeth D. Characterization of C-Si texturization in wet KOH/IPA and its effect on cell efficiency. In: Proceedings of 26th European Photovoltaic Solar Energy Conference and Exhibition. Hamburg: EU PVSEC, 2011, 2020-2023

[9] Gangopadhyay U, Kim K H, Dhungel S K, Manna U, Basu P K, Banerjee M, Saha H, Yi J. A novel low cost texturization method for large area commercial mono-crystalline silicon solar cells. Solar Energy Materials and Solar Cells, 2006, 90(20): 3557-3567

[10] Yang Z P, Yang Y, Li X D, Xu Y, Wang W J. Effect of sodium silicate on texture of single crystalline silicon wafer for solar cell. Journal of the Chinese Ceramic Society, 2005, 33(12): 1472-1476 (in Chinese)

[11] Fan Y J, Han P D, Liang P, Xing Y P, Ye Z, Hu S X. Differences in etching characteristics of TMAH and KOH on preparing inverted pyramids for silicon solar cells. Applied Surface Science, 2013, 264(1): 761-766

[12] Montesdeoca-Santana A, Jimenez-Rodriguez E, Gonzalez-Diaz B, Borchert D, Guerrero-Lemus R. Ultra-low concentration Na2CO3/NaHCO3 solution for texturization of crystalline silicon solar cells. Progress in Photovoltaics: Research and Applications, 2012, 20(2): 191-196

[13] Chen G, Kashkoush I. Effect of pre-cleaning on texturization of c-Si wafers in a KOH/IPA mixture. ECS Transactions, 2010, 25(15): 3-10

[14] Gosalvez M A, Nieminen R M. Surface morphology during anisotropic wet chemical etching of crystalline silicon. New Journal of Physics, 2003, 5(1): 100-1-100-28

[15] Fesquet L, Olibet S, Damon-Lacoste J, DeWolf S, Hessler-Wyser A, Monachon C, Ballif C. Modification of textured silicon wafer surface morphology for fabrication of heterojunction solar cell with open circuit voltage over 700 mV. In: Proceedings of 34th IEEE Photovoltaic Specialists Conference. Philadelphia: IEEE, 2009, 754-758

[16] Damon-Lacoste J, Cabarrocas P R. Toward a better physical understanding of a-Si:H/c-Si heterojunction solar cells. Journal of Applied Physics, 2009, 105(6): 063712-1-063712-7

[17] Sopori B L, Pryor R A. Optical characteristics of textured /100/ oriented silicon surfaces-application to solar cells. In: Proceedings of 15th IEEE Photovoltaic Specialist Conference. Kissimmee: IEEE, 1981, 466-472

[18] Palik E D, Bermudez V M, Glembocki O J. Ellipsometric study of orientation-dependent etching of silicon in apueous KOH. ECS Transactions, 1985, 132(4): 871-884

[19] Hua X S, Zhang Y J, Wang HW. The effect of texture unit shape on silicon surface on the absorption properties. Solar Energy Materials and Solar Cells, 2010, 94(2): 258-262

[20] Park H, Kwon S, Lee J S, Lim H J, Yoon S, Kim D. Improvement on surface texturing of single crystalline silicon for solar cells by sawdamage etching using an acidic solution. Solar Energy Materials and Solar Cells, 2009, 93(10): 1773-1778

[21] Kovacs G T A, Maluf N I, Petersen K E. Bulk micromachining of silicon. Proceedings of the IEEE, 1998, 86(8): 1536-1551

[22] Kulkarni M S, Erk H F. Acid-based etching of silicon wafers: masstransfer and kinetic effects. Journal of the Electrochemical Society, 2000, 147(1): 176-188

[23] Park H, Lee J S, Kwon S, Yoon S, Kim D. Effect of surface morphology on screen printed solar cells. Current Applied Physics, 2010, 10(1): 113-118