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    Journals >Chinese Journal of Lasers >Volume 46 >Issue 7 >Page 0704009 > Article
    • Chinese Journal of Lasers
    • Vol. 46, Issue 7, 0704009 (2019)
    Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor
    Jing Ma1、3, Yuejing Qi2、3, Zengxiong Lu2、3、*, Jiani Su2, Guanghua Yang2、3, Wei Qi2, Qingyang Zhang2, and Jinxin Chen2
    Author Affiliations
  • 1 Academy of Opto-Electronics, Chinese Academy of Sciences, Beijing 100094, China
  • 2 Institute of Microelectronics of the Chinese Academy of Sciences, Beijing 100029, China
  • 3 School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/CJL201946.0704009 Cite this Article Set citation alerts
    Jing Ma, Yuejing Qi, Zengxiong Lu, Jiani Su, Guanghua Yang, Wei Qi, Qingyang Zhang, Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009 Copy Citation Text show less
    References

    [1] Fang C, Xiang Y, Qi K Q. Grating lateral shearing interferometry for suppressing zero-order crosstalk[J]. Chinese Journal of Lasers, 45, 0504002(2018).

    [2] Boeij W D, Kok H et al. . Full optical column characterization of DUV lithographic projection tools[J]. Proceedings of SPIE, 5377, 1960-1971(2004). http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=842101

    [3] Chang X N, Yao Y, Yan L. The development and investigation of displacement sensor[J]. Metrology & Measurement Technique, 36, 42-44(2009).

    [4] Zhu Z T, Pei W D, Li Y et al. Research and implementation of laser triangulation system based on telecentric lens[J]. Laser & Optoelectronics Progress, 55, 031002(2018).

    [5] Wang D P, Jin X, Zhou W J et al. Nonlinear error calibration method for capacitive displacement sensor based on laser interferometry[J]. Laser & Optoelectronics Progress, 54, 101203(2017).

    [6] Xu J. Method for analysis of dual frequency laser interference mainly instrument system of linear measurement error sources and error reduction[J]. Metrology & Measurement Technique, 40, 39-40(2013).

    [7] Miks A, Novak J, Novak P. Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor[J]. Applied Optics, 49, 3259-3264(2010). http://www.opticsinfobase.org/ao/abstract.cfm?uri=ao-49-17-3259

    [8] Ruprecht A K, Pruss C, Tiziani H J et al. Confocal micro-optical distance sensor: principle and design[J]. Proceedings of SPIE, 5856, 128-136(2005). http://spie.org/x648.html?product_id=612008

    [9] Pruss C, Ruprecht A, Korner K et al. Diffractive elements for chromatic confocal sensors[J]. DGaO Proceedings, 106-107(2005).

    [10] Miks A, Novak J, Novak P. Theory of hyperchromats with linear longitudinal chromatic aberration[J]. Proceedings of SPIE, 5945, 59450Y(2005). http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1330995

    [11] Zhu W B, Zhong J, Mo R Y et al. Design of spectral confocal chromatic displacement sensor objective[J]. Opto-Electronic Engineering, 37, 62-66(2010).

    [12] Liu Q, Wang Y, Yang W C et al. Chromatic confocal microscope with linear dispersive objective[J]. High Power Laser and Particle Beams, 26, 52-57(2014).

    [13] Tian Y, Liu B. Design of dispersion lens for chromatic confocal displacement sensor[J]. Optical Technique, 44, 381-384(2018).

    [14] Wu P Y, Yuan D C. Research of design of lenses used for chromatic confocal displacement sensor[J]. Tool Engineering, 46, 81-83(2012).

    [15] Liu Q, Yang W C, Yuan D C et al. Design of linear dispersive objective for chromatic confocal microscope[J]. Optics and Precision Engineering, 21, 2473-2479(2013).

    [16] Liu Q, Yang W C, Yuan D C et al. Optimization and selection of materials for dispersive objective of chromatic confocal microscope[J]. Opto-Electronic Engineering, 39, 111-117(2012).

    [17] Fischer R E. Optical system design[M]. 4th ed. New York: McGraw Hill, 63-68(2004).

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    Jing Ma, Yuejing Qi, Zengxiong Lu, Jiani Su, Guanghua Yang, Wei Qi, Qingyang Zhang, Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009
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