• Electronics Optics & Control
  • Vol. 26, Issue 4, 106 (2019)
WANG Yi-fan, ZHAO Qing-xu, WANG Pan, WU Wen-peng, and HU Zhen
Author Affiliations
  • [in Chinese]
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    DOI: 10.3969/j.issn.1671-637x.2019.04.021 Cite this Article
    WANG Yi-fan, ZHAO Qing-xu, WANG Pan, WU Wen-peng, HU Zhen. Design of Adaptive Fuzzy PI Controller for Micro-nano Manipulated Imaging System[J]. Electronics Optics & Control, 2019, 26(4): 106 Copy Citation Text show less
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    [2] BUTTERWORTH J,PAO L Y,ABRAMOVITCH D Y.Architectures for tracking control in atomic force microscopes[C]//Proceedings of the IFAC World Congress,2008:8236-8250.

    [3] ABRAMOVITCH D Y,ANDERSSON S B,PAO L Y,et al.A tutorial on the mechanisms,dynamics,and control of atomic force microscopes[C]//American Control Confe-rence,2007:3488-3502.

    [4] RANA M S,POTA H R,PETERSEN I R.A survey of methods used to control piezoelectric tube scanners in high-speed AFM imaging[J].Asian Journal of Control, 2018,20(4):1379-1399.

    [5] CHEN Y F,LI Y Z,SHAN G Q,et al.Design and implementation of a novel horizontal AFM probe utilizing a quartz tuning fork[J].International Journal of Precision Engineering & Manufacturing,2018,19(1):39-46.

    WANG Yi-fan, ZHAO Qing-xu, WANG Pan, WU Wen-peng, HU Zhen. Design of Adaptive Fuzzy PI Controller for Micro-nano Manipulated Imaging System[J]. Electronics Optics & Control, 2019, 26(4): 106
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