Hechen MENG, Xuan LUO, Xiaodan WANG, Da XU, Zhengdong SHU, Xionghui ZENG, Xiaodong GAO, Shunan ZHENG, Hongmin MAO. Structure and Luminescence Properties in Tb3+ and Pr3+ Doped AlN Films[J]. Acta Photonica Sinica, 2025, 54(2): 0231003

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- Acta Photonica Sinica
- Vol. 54, Issue 2, 0231003 (2025)

Fig. 1. Raman spectra of implanted AlN films

Fig. 2. X-ray rocking curve of AlN thin film (0002) crystal plane before and after ion implantation

Fig. 3. CL spectra of AlN with different dosages of Tb3+and Pr3+ implanted and the variation trend of integrated intensities of emission peak of Tb3+and Pr3+

Fig. 4. Energy transfer mechanism in the Tb3+ and Pr3+

Fig. 6. The CIE chromaticity diagram of the Tb3+ and Pr3+co- doped AlN films
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Table 1. Parameters of ion implantation dose in AlN∶ Tb3+ and AlN∶ Tb3+, Pr3+ samples
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Table 2. Calculation results of average injection dose Cpand critical distance Rc
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Table 3. Luminescent chromaticity coordinates and color temperature of AlN with different doses of Tb3+and Pr3+ions co- doped

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