Wei-zheng LEI, Lü-jun YUAN, Yan KANG, Zhi-de SU. Nonlinear Optimization Method for Reconstruction of the Off-axis Aspherical Surface by Profile Measurement[J]. Acta Photonica Sinica, 2019, 48(12): 1212004
- Acta Photonica Sinica
- Vol. 48, Issue 12, 1212004 (2019)
Fig. 1. Top view of position relationship between central aspheric and off-axis aspheric
Fig. 2. Two relationship between center aspheric coordinate and off-axis aspheric coordinate
Fig. 3. 测量坐标系XYZ 与离轴非球面坐标系X SY SZ S的偏转关系Coordinate deflection between real measuring coordinate XYZ and off-axis coordinate X SY SZ S
Fig. 4. 仿真理想椭球面和镜面残余误差以及恢复面形Simulating ideal aspherical surface and its residual and reconstructed surface residual
Fig. 5. Surface error of the 570 mm off-axis-elliptic mirror
Fig. 6. Surface error of the 570 mm off-axis-elliptic mirror after several times grinding
Fig. 7. 220 mm×96 mm rectangle-shaped off-axis ellipsoidal mirror and side structure sketch
Fig. 8. Surface error of the 220 mm×96 mm rectangle-shaped off-axis mirror
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Table 1. Optimization result with errors
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