• Chinese Optics Letters
  • Vol. 19, Issue 5, 051401 (2021)
Xun Li1、2, Ming Li1、*, and Hongjun Liu1、3、**
Author Affiliations
  • 1State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics of CAS, Xi’an 710119, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
  • 3Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
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    DOI: 10.3788/COL202119.051401 Cite this Article Set citation alerts
    Xun Li, Ming Li, Hongjun Liu. Effective strategy to achieve a metal surface with ultralow reflectivity by femtosecond laser fabrication[J]. Chinese Optics Letters, 2021, 19(5): 051401 Copy Citation Text show less
    Images of micro/nano structures fabricated by the fs laser at the focal plane. The laser power and scanning speed were 20 W and 50 mm/s, respectively.
    Fig. 1. Images of micro/nano structures fabricated by the fs laser at the focal plane. The laser power and scanning speed were 20 W and 50 mm/s, respectively.
    Morphology of micro/nano structures induced by the fs laser at different defocusing distances: (a) 1.60 mm; (b) 1.62 mm; (c) 1.64 mm; (d) 1.66 mm; (e) 1.68 mm.
    Fig. 2. Morphology of micro/nano structures induced by the fs laser at different defocusing distances: (a) 1.60 mm; (b) 1.62 mm; (c) 1.64 mm; (d) 1.66 mm; (e) 1.68 mm.
    Reflection spectra of the samples fabricated by the fs laser at different defocusing distances.
    Fig. 3. Reflection spectra of the samples fabricated by the fs laser at different defocusing distances.
    SEM images of micro/nano hybrid structures fabricated by the fs laser at different scanning intervals: (a) 50 µm; (b) 40 µm; (c) 30 µm; (d) 20 µm.
    Fig. 4. SEM images of micro/nano hybrid structures fabricated by the fs laser at different scanning intervals: (a) 50 µm; (b) 40 µm; (c) 30 µm; (d) 20 µm.
    Three-dimensional morphology of hybrid micro/nano structures with different scanning intervals: (a) 50 µm; (b) 40 µm; (c) 30 µm; (d) 20 µm.
    Fig. 5. Three-dimensional morphology of hybrid micro/nano structures with different scanning intervals: (a) 50 µm; (b) 40 µm; (c) 30 µm; (d) 20 µm.
    Reflection spectra of the samples fabricated by the fs laser at different scanning intervals.
    Fig. 6. Reflection spectra of the samples fabricated by the fs laser at different scanning intervals.
    Blackened sample fabricated by the circularly polarized laser and its morphology.
    Fig. 7. Blackened sample fabricated by the circularly polarized laser and its morphology.
    Reflection spectra of the samples fabricated by linearly and circularly polarized fs lasers, respectively.
    Fig. 8. Reflection spectra of the samples fabricated by linearly and circularly polarized fs lasers, respectively.
    Mechanism of optical absorption of micro/nano hybrid structures processed by the circularly polarized laser.
    Fig. 9. Mechanism of optical absorption of micro/nano hybrid structures processed by the circularly polarized laser.
    Pulse Energy (µJ)Repetition Frequency (kHz)Laser Fluence (J/cm2)
    1005032 (single pulse)
    2005064 (single pulse)
    3005095 (single pulse)
    40050127 (single pulse)
    Table 1. Calculated Fluence of fs Laser at Different Pulse Energy
    Xun Li, Ming Li, Hongjun Liu. Effective strategy to achieve a metal surface with ultralow reflectivity by femtosecond laser fabrication[J]. Chinese Optics Letters, 2021, 19(5): 051401
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