Linfeng ZHAO, Mingxiang LING, Liwei XUE, Hao SHEN, Liguo CHEN. High-stroke XY precision positioning stage based on Zigzag flexure hinge[J]. Optics and Precision Engineering, 2024, 32(13): 2070
- Optics and Precision Engineering
- Vol. 32, Issue 13, 2070 (2024)
Fig. 1. Structure of positioning platform
Fig. 2. Overall structure of XY positioning platform
Fig. 3. Schematic diagram of voice coil motor
Fig. 4. Spring-mass-motor mechanical displacement system
Fig. 5. Schematic diagram of Zigzag and straight flexible leaf-spring
Fig. 6. Schematic diagram of straight beam flexible leaf-spring deformation
Fig. 7. Schematic of Zigzag flexible leaf-spring deformation
Fig. 8. Modal contour of straight beam flexible leaf-spring
Fig. 9. Modal cloud map of Zigzag flexible leaf-spring
Fig. 10. Simulation results analysis
Fig. 11. Displacement-stress curves of compliant platform
Fig. 12. Stress nebulae of simulation analysis for Zigzag and straight beam flexible leaf-spring
Fig. 13. Geometric dimensions of Zigzag flexible leaf-spring
Fig. 14. Geometric dimensions of XY positioning platform
Fig. 15. Finite element dynamic analysis of XY positioning platform
Fig. 16. Static simulation results of XY positioning stage
Fig. 17. Physical prototype of positioning platform
Fig. 18. Overall system of platform positioning
Fig. 19. Displacement steady-state error
Fig. 20. Displacement relationship between driving current and XY positioning platform
Fig. 21. Repeatability analysis of XY positioning platform displacement
Fig. 22. Displacement tracking analysis of XY positioning platform
Fig. 23. Frequency response in X and Y directions
Fig. 24. Resolution test of XY positioning platform
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Table 1. First six-order nature frequencies of flexible leaf-spring
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Table 2. Comparison of kinematic stiffness of two leaf-spring
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Table 3. Geometric parameters of two leaf-springs
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Table 4. Performance parameters of two platforms
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Table 5. Geometric dimensions of XY positioning platform
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Table 6. First sixth order frequency of Zigzag platform
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Table 7. Simulation results of parasitic motion of XY positioning platform
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Table 8. Dynamic and static parameters of XY positioning platform
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Table 9. Performance comparison of designed and existing typical XY positioning platforms
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