• Chinese Journal of Lasers
  • Vol. 39, Issue s1, 108013 (2012)
Zhang Jinlong1,*, Lian Meilin1, Xu Hui1, and Lei Huahuan2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl201239.s108013 Cite this Article Set citation alerts
    Zhang Jinlong, Lian Meilin, Xu Hui, Lei Huahuan. Research on the Long Range Precision Alignment System with Sub-Micron Accuracy[J]. Chinese Journal of Lasers, 2012, 39(s1): 108013 Copy Citation Text show less
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    [8] G. Y. Zhou, V. J. Logeeswaran, F. S. Chau. An open-loop nano-positioning micromechanical digital-to-analog converter for grating light modulation[J]. IEEE Photon. Technol. Lett., 2005, 17(5): 1010~1012

    [9] L. Sun, J. G. De, Y. J. Liu et al.. Investigation on a novel dual-grating macro-micro driven high speed precision positioning system for NEMS[C]. Proc. 1st IEEE Int. Conf. Nano Micro Engineered & Molecular Systems, 2006, 644~648

    [10] L. Z. Zhou, H. Furuhasi, Y. Uchida. Sensing characteristics of a precision aligner using Moiré gratings for precision alignment system[J]. Chinese J. Lasers B, 2001, 10(4): 257~262

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    Zhang Jinlong, Lian Meilin, Xu Hui, Lei Huahuan. Research on the Long Range Precision Alignment System with Sub-Micron Accuracy[J]. Chinese Journal of Lasers, 2012, 39(s1): 108013
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