Runze QI, Jinlong ZHANG, Qiushi HUANG, Zhong ZHANG, Zhanshan WANG. Research progress of multilayer optical elements in extreme ultraviolet and vacuum ultraviolet[J]. Optics and Precision Engineering, 2022, 30(21): 2639
- Optics and Precision Engineering
- Vol. 30, Issue 21, 2639 (2022)
Fig. 1. Reflectivity curves at different positions of Mo/Si multilayer sample in range of 210 mm×40 mm［53］
Fig. 2. （a） Diffraction curves and （b） experimental reflectivity curves of Al（w （Si）=1%）/Zr and Al（Pure）/Zr multilayers
Fig. 3. Relative surface roughness of Al（w （Si）=1%）/Zr multilayers as a function of annealing temperatures
Fig. 4. Theoretical reflectivity curves of Al/Mo/B4C multilayers at different solar lines
Fig. 5. Reflective performance of ［Al/Mo/B4C］/SiC and Mo/Si multilayers
Fig. 6. EUV reflectivity curves of Mg/SiC multilayer introducing different thicknesses of Zr barrier layers［62］
Fig. 7. Cross-section TEM images of Mg/Co multilayer［62］
Fig. 8. （a） EUV reflectivity curves of Mg/Zr multilayers at different annealing temperatures； （b） Relationship between normalized reflectivity and annealing temperatures of different Mg-based multilayers［62］
Fig. 9. High resolution TEM bright field images of Sc/Si multilayers
Fig. 10. EUV reflectivity curve of Sc/Si multilayer with γ Sc=0.65
Fig. 11. Theoretical reflectivity curves of Yb/Al multilayers introducing different thicknesses of SiC surface layer
Fig. 12. Theoretical and measured reflectivity curves of Yb/Al multilayer prepared under 4×10-5 Pa background vacuum at Ne I 73.59 nm wavelength
Fig. 13. Reflectivity curves of Al+eMgF2 mirrors （a） and Al+eLiF mirrors （b） prepared at different substrate temperatures
Fig. 14. Reflectivity curves of LaF3/MgF2 film in 105-130 nm wavelength range
Fig. 15. Reflectivity curves of LaF3/MgF2 film in 105-130 nm wavelength range
Fig. 16. Reflectivity curves of Mo / Si aperiodic broadband multilayer measured at NSRL and BESSY II stations［90］
Fig. 17. Reflectivity curves with wavelength range （a） and with grazing angle （b） of Mo / Si aperiodic broadband multilayer measured at BSRF stations［90］
Fig. 18. Polarization efficiency and measured reflectivities of Mo/Y multilayer broadband polarizer［86］
Fig. 19. Calculated and fitted phase shifts and measured transmission as function of wavelength at grazing incidence angles of 47°and 54°［90］
Fig. 20. Circular radiation from BESSY UE56/1-PGM beamline as functions of wavelength
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20