Original model and scaling model for an inner optical system are designed. Considering angular spectrum diffraction theory of light with heat conduction theory and thermal elastic theory, thermal deformation aberration and wavefront pre-compensation are simulated for both models. The scaling model can be numerically transformed to original model. Thermal deformation aberration is studied to indicate that astigmatism aberration is introduced with incident angle of irradiation laser. Thermal deformations and optical quality in scaling model are similar to results in original model, and the two models can realize good numerical reversion