• Chinese Optics Letters
  • Vol. 16, Issue 1, 010601 (2018)
Pei Yuan1、2, Yue Wang1、*, Yuanda Wu1、2, Junming An1、2, and Xiongwei Hu1
Author Affiliations
  • 1State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Science, Beijing 100083, China
  • 2College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100083, China
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    DOI: 10.3788/COL201816.010601 Cite this Article Set citation alerts
    Pei Yuan, Yue Wang, Yuanda Wu, Junming An, Xiongwei Hu. Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect[J]. Chinese Optics Letters, 2018, 16(1): 010601 Copy Citation Text show less
    (Color online) Schematic diagram of a typical AWG.
    Fig. 1. (Color online) Schematic diagram of a typical AWG.
    (Color online) Simulated effective refractive index of the waveguide with different widths and etching depths.
    Fig. 2. (Color online) Simulated effective refractive index of the waveguide with different widths and etching depths.
    (Color online) Transmission spectra of the central channel of the AWG with different width fluctuations (s).
    Fig. 3. (Color online) Transmission spectra of the central channel of the AWG with different width fluctuations (s).
    Widened arrayed waveguides.
    Fig. 4. Widened arrayed waveguides.
    (Color online) Transmission spectra of the 16 channels.
    Fig. 5. (Color online) Transmission spectra of the 16 channels.
    (Color online) Heat simulation.
    Fig. 6. (Color online) Heat simulation.
    Dependence of the Si waveguide’s average temperature on the applied power.
    Fig. 7. Dependence of the Si waveguide’s average temperature on the applied power.
    Micrograph of the AWG.
    Fig. 8. Micrograph of the AWG.
    (Color online) Transmission spectra with applied voltages of 0 and 60 V.
    Fig. 9. (Color online) Transmission spectra with applied voltages of 0 and 60 V.
    (Color online) Simulated transmission spectra of the central channel of the AWG with width deviations of 0, 5, and 10 nm, respectively.
    Fig. 10. (Color online) Simulated transmission spectra of the central channel of the AWG with width deviations of 0, 5, and 10 nm, respectively.
    (Color online) Measured wavelength compensation of the AWG under different voltages. (a) The transmission spectra of the 16th channel under different bias voltages. (b) The measured wavelength shift under different power consumptions.
    Fig. 11. (Color online) Measured wavelength compensation of the AWG under different voltages. (a) The transmission spectra of the 16th channel under different bias voltages. (b) The measured wavelength shift under different power consumptions.
    ParameterSymbolValue
    Thickness of top silicon of SOIH220 nm
    Waveguide widthw500 nm
    Thickness of slab waveguidesh70 nm
    Effective refractive index of slab waveguidens2.849257
    Effective refractive index of arrayed waveguidenc2.53455
    Group index of arrayed waveguideng3.796747
    Central wavelengthλ01.55252 μm
    Channel spacingΔλ1.6 nm
    Number of input channelsNi8
    Number of output channelsNo16
    Free spectral rangeFSR25.9
    Pitch width of arrayed waveguided2.25
    Heater spacingDh10 μm
    Heater widthWh10 μm
    Table 1. Design Parameters of the Silicon Nanowire AWG
    Pei Yuan, Yue Wang, Yuanda Wu, Junming An, Xiongwei Hu. Design and fabrication of wavelength tunable AWGs based on the thermo-optic effect[J]. Chinese Optics Letters, 2018, 16(1): 010601
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