Qian LIU, Le MI, Xiaojin HUANG. White-light interferometry immune to vibration disturbance over wide frequency region[J]. Optics and Precision Engineering, 2024, 32(17): 2625
- Optics and Precision Engineering
- Vol. 32, Issue 17, 2625 (2024)
Fig. 1. Flowchart of three-point arcsine algorithm
Fig. 2. Sketch of calculating scannig increment
Fig. 3. Scanning increment calculation error with linear disturbance
Fig. 4. Scanning increment calculation error with sinusoidal disturbance
Fig. 5. Scanning increment calculation error with random disturbance
Fig. 6. Calculated scanning increment with 3P-Asin algorithm
Fig. 7. Residual errors of reconstructed topography of step
Fig. 8. Captured one interferogram of measuring step
Fig. 9. Calculated scanning increment
Fig. 10. Measured profiles of step （Insets are enlarged profiles circled with dashed lines）
Fig. 11. Measured step heights
Fig. 12. Diverse surface reconstructed with 3P-Asin algorithm
Fig. 13. Measured step heights under sinusoidal disturbances with different amplitudes
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Table 1. RMSE of scanning increment calculation with different disturbances
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