Yang GAO, Jia JIA, Lin MENG, Zhihu RUAN, Huiliang CAO. Analysis and verification of phase error in force balance control loop of MEMS rate gyroscope[J]. Optics and Precision Engineering, 2024, 32(20): 3059
- Optics and Precision Engineering
- Vol. 32, Issue 20, 3059 (2024)
Fig. 1. Schematic block diagram of MEMS gyroscope based on FTR rate control mode
Fig. 2. Diagram of drive modal control loop with phase errors
Fig. 3. Trends in the effect of ωd-ωx on φx for different Qx
Fig. 4. Effect of phase error on drive modal control loop
Fig. 5. Schematic diagram of FTR control loop with phase error
Fig. 6. Effect of φye 1 on rate measurement with constant rate input
Fig. 7. Effect of φye 1 on magnitude-phase frequency characteristic of FTR rate measurement loop
Fig. 8. Trends in the effect of ωy-ωd and Qy on φy
Fig. 9. FTR rate measurement curves before and after phase compensation for different Qy
Fig. 10. Effect of φye 2 on magnitude-phase frequency characteristic of FTR rate measurement loop
Fig. 11. Effect of φye 3 on magnitude-phase frequency characteristic of FTR rate measurement loop
Fig. 12. Gyroscope measurement and control system and its test equipment
Fig. 13. Phase difference between the drive modal pickoff signal for the force balance excitation signal （solid） and the sense modal pickoff signal （dash）
Fig. 14. Bias curves and Allan variance curves before and after phase compensation
Fig. 15. Rate measurement bandwidth test curves before and after phase compensation
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Table 1. MEMS Gyroscope simulation parameters
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Table 2. Scale factor before and after phase error compensation
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