Fabrication Method for the Microlens Array of High F-number

LIU Xin; ZHANG Man; SHI Li-fang; CAO A-xiu; DENG Qi-ling

doi:10.3788/gzxb20174602.0222004

[1] CHEN Kuan-yu, CHANG Yung-ting, HO Yu-hsuan, et al. Emitter apodization dependent angular luminance enhancement of microlens-array film attached organic light-emitting devices［J］. Optics Express, 2010, 18(4): 3238-3243.

[2] QIONG Hua-wang, HUAN Deng, TIAN Tian-ao, et al. Imitating micro-lens array for integral imaging［J］. Chinese Optics Letters, 2010, 8(5): 512-514.

[3] DENG Ze-fang, YANG Qing, CHEN Feng, et al. High-performance laser beam homogenizer based on double-sided concave microlens［J］. IEEE Photonics Technology Letters, 2014, 26(20): 2086-2089.

[4] BUENO J, ACOSTA E, SCHWARZ C, et al. Wavefront measurement of phase combining a point-diffraction interferometer and a Hartmann-Shack sensor［J］. Applied Optics, 2010, 49(3): 450-456.

[5] HE Feng-tao. Study of the technologies of high-density optical date storage with short-wavelength laser source and solid lmmersion lens［D］. Xi′an: Xi′an Institute of Optics and Percision Mechanics, 2004.

[6] LEGGATT J S, HUTLEY M C. Microlens arrays for interconnection of individual mode fiber arrays［J］. Electronics Letters, 1991, 27: 238-240.

[7] AMATO D. The international society for optical engineering［C］. Bergen: Ocean optics, 1991: 166-177.

[8] WU Wen-ting, LIANG Zhong-cheng, ZHANG Le. Optofluidic varifocal microlens［J］. Chinese Journal of Luminescence, 2015, 36(6): 718-723.

[9] LIAO Jun, WANG Hai-dong, DING Jian-ping, et al. Multiple image produced by micro-lens array［J］. Chinese Journal of Lasers, 2001, 28(1): 52-54.

[10] LIN Che-ping, YANG Hai-harng, CHAO Ching-kong. Hexagonal microlens array modeling and fabrication using a thermal reflow process［J］. Journal of Micromechanics and Microengineering, 2003, 13(5): 775-781.

[11] LI Feng, CHEN Si-hai, LAI Jian-jun, et al. Design and fabrication of polymer microlens array with self-written waveguide［J］. Chinese Journal of Lasers, 2011, 38(3): 202-207.

[12] ZHANG Xin-yu, TANG Qing-le, ZHANG Zhi, et al. Ion beam etching fabrication of concave refraction microlens array［J］. Acta Optica Sinica, 2001, 21(4): 485-490.

[13] BORRELLI N F. Photolytic technique for producing microlens in photosensitive glass［J］. Applied Optics, 1985, 24(16): 2520-2525.

[14] OIKAWA M, IGA K. Array of distributed index planar microlens and its application［J］. Applied Optics, 1982, 21(9): 1052-1056.

[15] OIKAWAL M. Array of distributed-index planar micro-lenses prepared from ion-exchange technique［J］. Japanese Journal of Applied Physics, 1981, 20(4): 296-298.

[16] HAN Yan-ling, LIU De-sen, JIANG Xiao-ping. Sqare self-focusing lens array and its image［J］. Acta Photonica Sinica, 2007, 36(2): 221-223.

[17] LU Yi, CHEN Shao-chen. Direct write of microlens array using digital projection photopolymerization［J］. Applied Physics Letters, 2008, 92(4): 1-3.

[18] CHANG Chi-yuan, YANG Sen-yeu, HUANG Long-sun, et al. Fabrication of plastic microlens array using gas-assisted micro-hot-embossing with a silicon mold［J］. Infrared Physics and Technology, 2006, 48: 163-173.

[19] MACFARLANE D L, NARAYAN V, TATUM J A, et al. Microjet fabrication of microlens arrays［J］. IEEE Photonics Technology Letters, 1994, 6: 1112-1115.

[20] CHEN Ming-jun, LIU Ye-sheng, LI Zi-ang, et al. New research progress in design and manufacture of artificial optical compound eye［J］. Journal of Mechanical Engineering, 2011, 47(1): 151-168.

[21] XU Qiao, YE Jun, ZHOU Guang-ya. Fabrication of refractive microlens array by melting photoresist［J］. Acta Optica Sinica, 1996, 16(9): 1326-1331.

[22] POPOVIC Z D, SPRAGUE R A, NEVILLE G A. Technique for monolithic fabrication of microlens arrays［J］. Applied Optics, 1988, 27(7): 1281-1284.

[23] XU Qiao, YANG Li-ming, SHU Xiao-wu, et al. Step heat-forming photoresist method for expanding the NA range of refractive microlens［J］. Acta Optica Sinica, 1998, 18(8): 1128-1133.

[24] REN Zhi-bin, LU Zhen-wu. Improving the fill factor and F number of refractive microlens array by reducing developing time［J］. Journal of Optoelectronics Laser, 2005, 16(2): 150-154.

[25] BIAN Rui, XIONG Ying, CHEN Xian-yu, et al. Ultralong focal length microlens array fabricated based on SU-8 photoresist［J］. Applied Optics, 2015, 54(16): 5088-5093.

[26] WEI Hsiang-chun, SU Guo-dung. Self-assembled microlens on top of light-emitting diodes using hydrophilic effect for improving extraction efficiency and increasing viewing angle［J］. Journal of Display Technology, 2012, 8(8): 444-449.