• Acta Photonica Sinica
  • Vol. 44, Issue 9, 912004 (2015)
YUAN Ting1、2、*, ZHANG Feng1, TAO Xiao-ping1, ZHOU Run1、2, and FU Jin-jiang1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3788/gzxb20154409.0912004 Cite this Article
    YUAN Ting, ZHANG Feng, TAO Xiao-ping, ZHOU Run, FU Jin-jiang. Test of Optical Mirror Surface Using Fringe Reflection System[J]. Acta Photonica Sinica, 2015, 44(9): 912004 Copy Citation Text show less

    Abstract

    Large shape errors can be found from the stage of fine grinding to the beginning of polish, it is proved that it can′t satisfy the measuring requirements to test the mirrors with profilers or ordinary interferometer in that stage. To obtain the optical mirrors′ shape error based on fringe reflection, the method of high precision and large dynamic is proposed. The principle and system errors of the testing system were analyzed. To verify the feasible of the testing system, the model of testing on a reflecting mirror (the aperture is 100 mm) was built and simulated by ray tracing. The preliminary testing data on rotational symmetry spherical mirror is: PV is 0.523 μm, RMS is 0.086 μm, The feasibility of the testing system based on fringe reflection used in this period is verified.
    YUAN Ting, ZHANG Feng, TAO Xiao-ping, ZHOU Run, FU Jin-jiang. Test of Optical Mirror Surface Using Fringe Reflection System[J]. Acta Photonica Sinica, 2015, 44(9): 912004
    Download Citation