• Frontiers of Optoelectronics
  • Vol. 8, Issue 4, 351 (2015)
Wei XIONG1, Yunshen ZHOU1, Wenjia HOU1, Lijia JIANG1, Masoud MAHJOURI-SAMANI1, Jongbok PARK1, Xiangnan HE1, Yang GAO1, Lisha FAN1, Tommaso BALDACCHINI2, Jean-Francois SILVAIN3, and Yongfeng LU1、*
Author Affiliations
  • 1Department of Electrical Engineering, University of Nebraska-Lincoln, Lincoln NE 68588, USA
  • 2Technology and Applications Center, Newport Corporation, Irvine, CA 92606, USA
  • 3Institute of Chemistry of Condensed Matter of Bordeaux, ICMCB-CNRS 87, Avenue du Docteur Albert Schweitzer F-33608 Pessac Cedex, France
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    DOI: 10.1007/s12200-015-0481-3 Cite this Article
    Wei XIONG, Yunshen ZHOU, Wenjia HOU, Lijia JIANG, Masoud MAHJOURI-SAMANI, Jongbok PARK, Xiangnan HE, Yang GAO, Lisha FAN, Tommaso BALDACCHINI, Jean-Francois SILVAIN, Yongfeng LU. Laser-based micro/nanofabrication in one, two and three dimension[J]. Frontiers of Optoelectronics, 2015, 8(4): 351 Copy Citation Text show less

    Abstract

    Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, roomtemperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laserbased micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.
    Wei XIONG, Yunshen ZHOU, Wenjia HOU, Lijia JIANG, Masoud MAHJOURI-SAMANI, Jongbok PARK, Xiangnan HE, Yang GAO, Lisha FAN, Tommaso BALDACCHINI, Jean-Francois SILVAIN, Yongfeng LU. Laser-based micro/nanofabrication in one, two and three dimension[J]. Frontiers of Optoelectronics, 2015, 8(4): 351
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