Jian-biao ZHOU, Mu-yang ZHANG, Yan-mei LIANG. Correction Methods of Adjustment Errors for the Parallel Plate-based Lateral-shearing Interferometer[J]. Acta Photonica Sinica, 2020, 49(3): 0322003
- Acta Photonica Sinica
- Vol. 49, Issue 3, 0322003 (2020)
Fig. 1. Schematic diagram of the parallel plate-based lateral-shearing interferometer
Fig. 2. Flow chart of adjustment of the angle error of the parallel plate
Fig. 3. Experimental setup and shearing interferograms
Fig. 4. Relationship between the angle error of the parallel plate and Δa 6
Fig. 5. Repeatability of relationship between the angle error of the parallel plate and Δa 6
Fig. 6. Relationship between the angle error and Δa 6 with different number of fitting terms
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Table 1. Comparison of fitting results using different number of terms
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