Fig. 1. Morphology of microfluidic beam deposition with different proportions of additives
Fig. 2. Finite element simulation model of microbeam electrolysis system
Fig. 3. Numerical simulation of microbeam electrolysis system deposition of copper columns for 40 minutes(legend indicating the flow velocity of the liquid beam and arrow indicating the current vector)
Fig. 4. Deposition velocity distribution curves of cathode surface with different deposition heights
Fig. 5. Schematic diagram of electrochemical 3D printing experimental platform
Fig. 6. Mean value of factor data and signal-to-noise ratio(SNR)
Fig. 7. Response surface model of factors A-SPS, B-PEG, C-Cl- and D-current amplitude to surface roughness
Fig. 8. Surface roughness with different process parameters
Fig. 9. Helix structure printed with optimal parameters
Fig. 10. Spiral structure printed without additives
SPS/PEG/Cl- | Morphology characteristics | Formation reasons |
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Excess SPS | Dark red or black, non-glossy coating in low current density regions; numerous pits in high current density regions | Excess SPS inhibits copper crystallization | Low SPS | Non-glossy in low current density regions, not burnt in high current density regions, small glossy area | Insufficient SPS on the cathode surface to form a glossy area | Excess PEG | Glossy in high and medium current density regions, rough in low current density regions | PEG cannot inhibit hydrogen evolution in low current density regions | Low PEG | Poor leveling and glossiness in high and medium current density regions | The consumption rate of PEG molecules during electrodeposition is less than the diffusion rate of the leveling agent from the solution to the electrode surface | Excess Cl- | Red deposition morphology in high, medium, and low current density regions | "Chlorine bridge" effect between copper ions and chloride ions increases polarization current | Low Cl- | Sponge-like burnt appearance in high current density regions | Lack of CuCl- film formation on the cathode metal surface |
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Table 1. Single additive variable deposition morphology and formation reasons
Boundary condition | Boundary | Property |
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Anode surface | 2,8 | Φs,ext=3 V | Cathode surface | 5 | Φs,ext=0 V | Insulation | 3,7 | - | Specified normal grid velocity | 5 | Vn | Zero normal grid velocity | 4,6 | - | Inlet | 1 | U0=1 m/s | Outlet | 4,6 | - | Steady-state free surface | 3,7 | - |
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Table 2. Domain definitions and boundary conditions for microbeam electrolysis system simulation
Factors | Level 1 | Level 2 | Level 3 |
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SPS Concentration/10-6 | 10 | 40 | 70 | PEG Concentration/10-6 | 50 | 100 | 150 | Cl- Concentration/10-6 | 30 | 60 | 90 | CuSO4/(g·L-1) | 40 | 70 | 100 | H2SO4/(g·L-1) | 150 | 180 | 210 |
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Table 3. Value of controllable factors on different levels
No. | SPS/10-6 | PEG/10-6 | Cl-/10-6 | CuSO4/(g·L-1) | H2SO4/(g·L-1) | Surface-ness/Sa |
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1 | 10 | 50 | 30 | 40 | 150 | 21 | 2 | 10 | 50 | 30 | 70 | 180 | 22.68 | 3 | 10 | 50 | 30 | 100 | 210 | 20.04 | 4 | 10 | 100 | 60 | 40 | 180 | 11.28 | 5 | 10 | 100 | 60 | 70 | 210 | 10.68 | 6 | 10 | 100 | 60 | 100 | 150 | 12.12 | 7 | 10 | 150 | 90 | 40 | 210 | 22.44 | 8 | 10 | 150 | 90 | 70 | 150 | 23.64 | 9 | 10 | 150 | 90 | 100 | 180 | 22.44 | 10 | 40 | 100 | 90 | 40 | 150 | 14.06 | 11 | 40 | 100 | 90 | 70 | 180 | 16.53 | 12 | 40 | 100 | 90 | 100 | 210 | 13.11 | 13 | 40 | 150 | 30 | 40 | 180 | 17.765 | 14 | 40 | 150 | 30 | 70 | 210 | 18.715 | 15 | 40 | 150 | 30 | 100 | 150 | 16.815 | 16 | 40 | 50 | 60 | 40 | 210 | 16.91 | 17 | 40 | 50 | 60 | 70 | 150 | 15.58 | 18 | 40 | 50 | 60 | 100 | 180 | 13.775 | 19 | 70 | 150 | 60 | 40 | 150 | 20.88 | 20 | 70 | 150 | 60 | 70 | 180 | 22.08 | 21 | 70 | 150 | 60 | 100 | 210 | 18.48 | 22 | 70 | 50 | 90 | 40 | 180 | 17.76 | 23 | 70 | 50 | 90 | 70 | 210 | 21.36 | 24 | 70 | 50 | 90 | 100 | 150 | 22.68 | 25 | 70 | 100 | 30 | 40 | 210 | 12.96 | 26 | 70 | 50 | 30 | 70 | 150 | 16.44 | 27 | 70 | 50 | 30 | 100 | 180 | 21.36 |
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Table 4. Orthogonal test result created by Minitab
Factor | Code | Conversion formula between encoded and real values | Level |
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Encoded value | Real value | -1 | 0 | 1 |
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SPS/10-6 | A | a | A=(a-40)/10 | 30 | 40 | 50 | PEG/10-6 | B | b | B=(b-100)/20 | 80 | 100 | 120 | ![]() /10-6 | C | c | C=(c-60)/20 | 40 | 60 | 80 | Current amplitude /mA | D | d | D=(d-7.5)/2.5 | 5 | 7.5 | 10 |
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Table 5. Response surface analysis factors and levels
No. | SPS/10-6 | PEG/10-6 | Cl-/10-6 | Current amplitude /mA | Surface roughness /μm | No. | SPS/10-6 | PEG/10-6 | Cl-/10-6 | Current amplitude /mA | Surface roughness /μm |
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1 | 40 | 100 | 60 | 7.5 | 1.17 | 15 | 30 | 100 | 40 | 7.5 | 15.74 | 2 | 50 | 100 | 80 | 7.5 | 5.59 | 16 | 40 | 100 | 40 | 10 | 5.24 | 3 | 40 | 80 | 60 | 10 | 8.93 | 17 | 40 | 120 | 60 | 10 | 2.54 | 4 | 50 | 100 | 60 | 5 | 10.87 | 18 | 40 | 80 | 40 | 7.5 | 15.24 | 5 | 30 | 80 | 60 | 7.5 | 16.54 | 19 | 40 | 120 | 60 | 5 | 6.04 | 6 | 30 | 100 | 60 | 10 | 9.76 | 20 | 40 | 120 | 80 | 7.5 | 8.34 | 7 | 40 | 100 | 80 | 10 | 6.84 | 21 | 30 | 120 | 60 | 7.5 | 8.88 | 8 | 40 | 120 | 40 | 7.5 | 4.06 | 22 | 30 | 100 | 80 | 7.5 | 11.34 | 9 | 40 | 100 | 40 | 5 | 7.52 | 23 | 50 | 100 | 60 | 10 | 5.56 | 10 | 30 | 100 | 60 | 5 | 8.24 | 24 | 40 | 100 | 60 | 7.5 | 0.07 | 11 | 40 | 100 | 80 | 5 | 6.31 | 25 | 50 | 100 | 40 | 7.5 | 11.24 | 12 | 50 | 120 | 60 | 7.5 | 8.51 | 26 | 50 | 80 | 60 | 7.5 | 11.89 | 13 | 40 | 80 | 60 | 5 | 12.45 | 27 | 40 | 100 | 60 | 7.5 | 0.69 | 14 | 40 | 80 | 80 | 7.5 | 7.42 | | | | | | |
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Table 6. Response surface analysis scheme and test results
Source | Df | Mean square | F-value | P-value |
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Model | 14 | 33.22 | 13.04 | <0.000 1** | A-SPS | 1 | 23.80 | 9.34 | 0.010 0* | B-PEG | 1 | 98.04 | 38.47 | <0.000 1** | C-Cl- | 1 | 14.08 | 5.53 | 0.036 7* | D-Current amplitude | 1 | 18.08 | 5.53 | 0.036 7* | AB | 1 | 4.84 | 1.90 | 0.193 3 | AC | 1 | 0.422 5 | 0.165 8 | 0.691 1 | AD | 1 | 11.56 | 4.54 | 0.054 6 | BC | 1 | 36.60 | 14.36 | 0.002 6** | BD | 1 | 0.010 0 | 0.003 9 | 0.951 1 | CD | 1 | 2.25 | 0.882 8 | 0.366 0 | A² | 1 | 207.50 | 81.42 | <0.000 1** | B² | 1 | 113.47 | 44.52 | <0.000 1** | C² | 1 | 78.03 | 30.62 | <0.000 1** | D² | 1 | 21.87 | 8.58 | 0.012 6* | Lack of fit test | 10 | 3.00 | 9.88 | 0.095 3 |
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Table 7. Results of variance analysis of surface roughness