The solar simulator is a device that uses artificial light to simulate sunlight, as an important component of the solar simulator, the accuracy of the filter spectral requirements are getting higher and higher. In this paper, a step compensation filter with five different spectral requirements in the 0.4~1.1 μm band is designed by establishing a mathematical model and introducing a new evaluation function. In the process of film preparation, the least squares method was used to fit the experimental data, and the relationship between the residual deposition amount and the thickness of the film was found, which solves the spectral effect of the residual deposition on the film, and the film finally meets the requirements.