• Photonics Research
  • Vol. 9, Issue 5, 792 (2021)
Lei Wang1、†, Zixian Wei2、3、†, Chien-Ju Chen4、†, Lai Wang1、5、*, H. Y. Fu2、3、6、*, Li Zhang3, Kai-Chia Chen4, Meng-Chyi Wu4、7、*, Yuhan Dong3, Zhibiao Hao1, and Yi Luo1
Author Affiliations
  • 1Beijing National Research Center for Information Science and Technology (BNRist), Department of Electronic Engineering, Tsinghua University, Beijing 100084, China
  • 2Tsinghua-Berkeley Shenzhen Institute (TBSI), Tsinghua University, Shenzhen 518055, China
  • 3Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China
  • 4Institute of Electronics Engineering, Taiwan Tsing Hua University, Hsinchu 30013, Taiwan, China
  • 5e-mail: wanglai@tsinghua.edu.cn
  • 6e-mail: hyfu@sz.tsinghua.edu.cn
  • 7e-mail: mcwu@ee.nthu.edu.tw
  • show less
    DOI: 10.1364/PRJ.411863 Cite this Article Set citation alerts
    Lei Wang, Zixian Wei, Chien-Ju Chen, Lai Wang, H. Y. Fu, Li Zhang, Kai-Chia Chen, Meng-Chyi Wu, Yuhan Dong, Zhibiao Hao, Yi Luo. 1.3 GHz E-O bandwidth GaN-based micro-LED for multi-gigabit visible light communication[J]. Photonics Research, 2021, 9(5): 792 Copy Citation Text show less

    Abstract

    The data rate of a visible light communication (VLC) system is basically determined by the electrical-to-optical (E-O) bandwidth of its light-emitting diode (LED) source. In order to break through the intrinsic limitation of the carrier recombination rate on E-O bandwidth in conventional c-plane LEDs based on InGaN quantum wells, a blue micro-LED with an active region of nano-structured InGaN wetting layer is designed, fabricated, and packaged to realize a high-speed VLC system. The E-O bandwidth of the micro-LED can reach up to 1.3 GHz. Based on this high-speed micro-LED, we demonstrated a data rate of 2 Gbps with a bit error rate (BER) of 1.2×10-3 with simple on-off keying signal for a 3-m real-time VLC. In addition, a 4-Gbps VLC system using quadrature phase shift keying-orthogonal frequency-division multiplexing with a BER of 3.2×10-3 is also achieved for the same scenario. Among all the point-to-point VLC systems based on a single-pixel LED, this work has the highest distance-bandwidth product of 3 GHz·m and the highest distance-rate product of 12 Gbps·m.

    1. INTRODUCTION

    Visible light communication (VLC) is a promising solution for the next-generation high-speed access technology. As an important supplement to radio frequency (RF) communication, the available spectrum of VLC is over 3 orders of magnitude wider than the RF one. VLC can be combined with solid-state lighting, which has been widely implemented in many fields. In addition, VLC exhibits the advantages of low power consumption, no electromagnetic interference, eye-safety, and strong confidentiality [1]. It is simultaneously suitable for high-speed communication and illumination applications in special environments such as airports, hospitals, nuclear power plants, underwater [2], and deep space [3]. The electrical-to-optical (E-O) bandwidth of the light-emitting device is critical in a bandwidth-limited VLC system, although there are alternative approaches to optimize the responsivity and detectivity of photodetectors such as germanium/perovskite heterostructures and InGaN multiple quantum well (QW) micro-size photodetectors [4,5]. In comparison with commercial light-emitting diodes (LEDs), micro-size LEDs (micro-LEDs) based on III-nitride semiconductors with smaller active area and lower RC delay provide a promising approach to improve the E-O bandwidth [6,7]. Beneficial from the high E-O bandwidth, the micro-LED has great potential for high-speed VLC implementation [8,9]. The data rate of micro-LED-based VLC using non-return-to-zero on-off keying (NRZ-OOK) can reach up to 1 Gbps, and multi-Gbps data rates can be achieved by advanced modulation formats such as quadrature phase shift keying (QPSK), quadrature amplitude modulation (QAM), or orthogonal frequency-division multiplexing (OFDM) [1017]. Tsonev et al. have demonstrated a VLC link with data rate over 3 Gbps based on a micro-LED using OFDM and then the data rate is extended to 5 Gbps afterwards [1012]. Currently, single-pixel GaN-based micro-LEDs have been able to achieve a data rate of 10 Gbps by using bit-loading OFDM [13]. In addition, green-band, deep-ultraviolet, and perovskite materials have also been introduced for free-space communication applications [1416]. Xie et al. adopted a series-structure micro-LED array with 18-mW emitting power to realize a VLC system with a data rate of 5.18 Gbps [17].

    However, traditional c-plane InGaN-based QW LED devices have long suffered from the limitation of the polarization-field-induced quantum-confined Stark effect (QCSE) [18]. The QCSE leads to a longer carrier lifetime in the QW at low current density, which limits the E-O bandwidth of devices. Therefore, high carrier concentration is required to screen the polarization field and shorten the carrier lifetime. A high E-O bandwidth of near 1 GHz has already been presented in micro-LEDs operating at a high current density [12,19]. However, the high current density will sacrifice the luminous efficiency of the LED which is well known as efficiency droop. Although there have been efforts to develop LED epitaxial structures optimized for shortening carrier lifetime under lower current density, the typical E-O bandwidth and operating current density of a c-plane micro-LED are still below 1 GHz and beyond 1  kA/cm2, respectively. Achieving high E-O bandwidth LEDs under lower current density by growing InGaN-based QW devices on semi-polar or non-polar surfaces to suppress the QCSE is considered a fundamental solution [2023]. For QW samples, the QCSE of semi-polar and non-polar samples will be significantly smaller than that of polar ones. High E-O bandwidth micro-LEDs beyond 1 GHz based on semi-polar and non-polar substrates have been demonstrated successfully [21,24]. Even though the injection current density for high E-O bandwidth of the semi-polar and non-polar micro-LEDs is significantly reduced, the high cost and small size of semi-polar and non-polar substrates limit the mass production of high-speed LEDs. In recent years, GaN-based quantum dots (QDs), as nanomaterials with extremely strong three-dimensional quantum confinement capabilities, have received tremendous attention and have been applied in various optoelectronic devices [2530]. For QDs, the carrier lifetime can be efficiently decreased since the reduced dimensionality of the active region [31]. In addition, the strain can usually be relaxed during the QD formation process, so the QCSE will also be significantly smaller than that of the polar QW samples [32,33]. In traditional Stranski-Krastanov (SK) mode growth of InGaN QDs, an InGaN wetting layer is unavoidably formed beneath the QD layer [26]. However, light-emitting devices utilizing the InGaN wetting layer beneath the SK QDs are rarely reported. Here, we try to use the InGaN wetting layer as the active region of high-speed LEDs based on the traditional mature c-plane GaN growth and device fabrication process. Since the formation of the wetting layer is accompanied by the three-dimensional formation of QDs, the wetting layer also undergoes sufficient strain relaxation. Hence, the carrier lifetime in the wetting layer will be much shorter due to significantly suppressed QCSE, which is beneficial for the realization of high speed LEDs at lower current densities.

    E-O bandwidths versus current densities for the non-polar LED, semi-polar LED, and polar LED comparison between different reports.

    Figure 1.E-O bandwidths versus current densities for the non-polar LED, semi-polar LED, and polar LED comparison between different reports.

    In this paper, we present a 1-GHz modulation bandwidth VLC system based on a single-pixel micro-LED with an E-O bandwidth of 1.3 GHz under a current density of 528.5  A/cm2. A 3-m VLC system with a 2-Gbps NRZ-OOK data rate with bit error rate (BER) of 1.2×103 and with 4-Gbps QPSK-OFDM with BER of 3.2×103 is experimentally demonstrated and analyzed. To the authors’ best knowledge, as for all the single-pixel LED-based point-to-point VLC systems, the present one achieved the highest distance-bandwidth product of 3 GHz·m and the highest distance-rate product of 12 Gbps·m using QPSK-OFDM. This work paves the way to next-generation illumination devices with InGaN nano-materials for high-speed VLC and shows great potential in actual free-space optical communication application.

    2. MATERIALS, DEVICES, AND SYSTEM SETUP

    A. Epitaxial Growth

    (a) Schematic of the epitaxial structure of the wetting layer LED. (b) A 10 μm × 10 μm AFM image of the bare wetting layer sample. (c) A 1.5 μm × 1.5 μm AFM image of the nano-structured wetting layer. (d) A high-angle annular dark field scanning transmission electron microscope (HAADF STEM) image of the LED sample. (e) A magnified bright-field (BF) STEM image of the wetting layer region.

    Figure 2.(a) Schematic of the epitaxial structure of the wetting layer LED. (b) A 10 μm × 10 μm AFM image of the bare wetting layer sample. (c) A 1.5 μm × 1.5 μm AFM image of the nano-structured wetting layer. (d) A high-angle annular dark field scanning transmission electron microscope (HAADF STEM) image of the LED sample. (e) A magnified bright-field (BF) STEM image of the wetting layer region.

    In order to observe the morphology of the QDs and wetting layer, another sample without capping layer was grown, which maintained the same structure beneath the active region. The surface morphology of the sample was measured by a Bruker Dimension Icon atomic force microscope (AFM).

    A 10 μm × 10 μm AFM image of the sample is shown as Fig. 2(b). In previous work, green InGaN QDs with a density around 3×1089×108  cm2 can be grown by the two-step growth interruption method [26,34]. The nominal thickness of the InGaN film is usually 2‒3 nm, and the growth temperature is between 640°C and 650°C. In this work, in order to reduce the density of QDs formed on the sample surface, the nominal thickness of the InGaN layer was reduced to 1.5 nm, and the growth temperature was also increased to 655°C to decompose the upper QDs as much as possible. The green ellipses in Fig. 2(b) indicate the remaining InGaN QDs on the sample surface, and the density of QDs is reduced to 2×107  cm2. Therefore, the wetting layer is distributed over most of the sample surface, and the luminescence of the sample is dominated by the wetting layer. Subsequent photoluminescence test also found that the peak wavelength of the sample is almost consistent with the wetting layer peak in the previous green QD samples [26].

    In order to observe the morphology of the wetting layer sample in depth, a 1.5 μm × 1.5 μm AFM image is shown in Fig. 2(c). It can be seen that the nano-structured InGaN wetting layer appears like a broken nano-carpet. This unique nanostructure allows the wetting layer to fully release the compressive strain, thereby suppressing the QCSE and shortening the carrier life in the wetting layer. Figure 2(d) shows a high-angle annular dark-field scanning transmission electron microscope (STEM) image of the LED sample, which demonstrates that the actual thickness of each layer of the sample is quite consistent with the design. A larger magnification bright-field STEM image shows that the wetting layer has a height around 2 nm, as shown in Fig. 2(e).

    B. Structure, Fabrication, Optical and Electrical Characteristics of Micro-LED

    (a) 3D view of the designed cross-sectional structure for the micro-LED. (b) The image of the top view of the mesa/anode (75 μm/100 μm in diameter) for the micro-LED observed by scanning electron microscopy (SEM, JSM-7000F).

    Figure 3.(a) 3D view of the designed cross-sectional structure for the micro-LED. (b) The image of the top view of the mesa/anode (75 μm/100 μm in diameter) for the micro-LED observed by scanning electron microscopy (SEM, JSM-7000F).

    (a) Light-current density-voltage (L–J–V) characteristics for the micro-LED and the EQE measurement of the samples. (b) The external quantum efficiency versus applied current densities. (c) The emissive spectra of the micro-LED. (d) The value of peak wavelength shifts with different current densities.

    Figure 4.(a) Light-current density-voltage (LJV) characteristics for the micro-LED and the EQE measurement of the samples. (b) The external quantum efficiency versus applied current densities. (c) The emissive spectra of the micro-LED. (d) The value of peak wavelength shifts with different current densities.

    C. VLC System Setup

    Schematic of the micro-LED-based VLC system in a typical indoor environment over 3-m link.

    Figure 5.Schematic of the micro-LED-based VLC system in a typical indoor environment over 3-m link.

    (a) Photograph of the micro-LED-based VLC system in a typical indoor environment. (b) Wetting layer micro-LED-based transmitter and (c) APD module-based receiver.

    Figure 6.(a) Photograph of the micro-LED-based VLC system in a typical indoor environment. (b) Wetting layer micro-LED-based transmitter and (c) APD module-based receiver.

    The QPSK-OFDM experimental demonstration can be divided into real-time communication and off-line processing. The signal is modulated and demodulated off-line, as shown in Fig. 5. First, the NRZ-OOK data stream is generated and mapped into the QPSK-OFDM signal format with 256 carriers via a MATLAB program. The modulated serial signal is converted into parallel and then Hermitian symmetry is imposed before performing an inverse fast Fourier transform. The cyclic prefix (CP) of 1/16 is inserted into the low-speed parallel blocks which are then converted back into a serial format. In addition, in order to obtain a suitable format for demodulation, a synchronization sequence is added in front of the frame, which is then uploaded into an arbitrary waveform generator (AWG, AWG7000A, Tektronix). The AWG generates an up-sampled RF signal to conduct the real-time communication experiments. At the receiver, a high-speed sampling oscilloscope (DPO75902SX, Tektronix) is used for recording the down-sampled signal with different data rates under various injection current densities. Meanwhile, a signal analyzer (N9030B, Keysight) is used to observe the signal spectrum. Recorded data have been further processed in MATLAB. After synchronization, the high-speed serial data stream is converted into low-speed parallel data blocks and the CP has been removed. Parallel time-domain signals are transformed into frequency-domain signals by a fast Fourier transform. After further performing equalization through channel estimation, the serial QAM signal is de-mapped into a baseband signal that has been then compared with the original input signal to evaluate the BER.

    3. RESULTS AND DISCUSSION

    A. Optical Properties and Carrier Dynamics

    (a) TDPL spectra of the sample. The inset is a photograph of the sample excited by the laser. (b) The temperature dependence of peak wavelength and FWHM. (c) TRPL measurement. (d) Calculated τfast and τslow of the decay curves at different temperatures using a bi-exponential decay model.

    Figure 7.(a) TDPL spectra of the sample. The inset is a photograph of the sample excited by the laser. (b) The temperature dependence of peak wavelength and FWHM. (c) TRPL measurement. (d) Calculated τfast and τslow of the decay curves at different temperatures using a bi-exponential decay model.

    Temperature-dependent time-resolved photoluminescence (TRPL) measurement is carried out to reveal the carrier dynamics of the LED sample, and the detection wavelength is set according to the emission peak. The TRPL is performed using a tunable femtosecond laser with a 380-nm excitation wavelength and 100-fs FWHM pulse width. The repetition rate and average energy of each pulse are recorded to be 8 MHz and 62.5 pJ, respectively. Figure 7(c) shows the temperature-dependent TRPL results, which show that as the temperature increases, the carrier lifetime of the sample does not change much at first, but when the temperature exceeds 150 K the carrier lifetime begins to increase. Furthermore, TRPL curves can be fitted using a bi-exponential decay model, which is defined as follows: I=A1et/τfast+A2et/τslow,where I represents the intensity, t represents time, τ is the carrier recombination lifetime, and τfast and τslow refer to the fast decay lifetime and the slow decay lifetime in the TRPL curve, respectively. Figure 7(d) shows τfast and τslow at different temperatures. According to the results, as the temperature increases from 5 to 300 K, τfast is always maintained at around 1.4 ns, while τslow stays at 4 ns at first, but after 150 K it quickly increases to 11.7 ns. Carrier lifetime is a key parameter for VLC devices. When it is small enough, it signifies that carriers can quickly recombine, meaning that the modulation speed of the devices can also increase. Compared to the conventional QW devices with a τ as long as several nanoseconds, which limits the device E-O bandwidth to the order of megahertz, the τ as short as 1 ns of the sample demonstrates a great potential for gigahertz-range VLC.

    B. E-O Bandwidth of Micro-LED Measured on Wafer

    (a) E-O bandwidth of the wetting layer micro-LED on wafer measurement for different current densities. (b) Original normalized frequency response. Inset: the device under RF GS micro-probe was observed by optical microscope.

    Figure 8.(a) E-O bandwidth of the wetting layer micro-LED on wafer measurement for different current densities. (b) Original normalized frequency response. Inset: the device under RF GS micro-probe was observed by optical microscope.

    In our work, the following bandwidth measurements are strictly distinguished in different situations, which include the E-O bandwidth of the micro-LED device tested on wafer, the E-O bandwidth of the packaged micro-LED device, and the modulation bandwidth of the VLC system. Obviously, considering the actual application, the values of bandwidth will decrease from the micro-LED chip to the packaged micro-LED device, and then decrease from the packaged micro-LED device to the modulation bandwidth of the VLC system. Therefore, the back-to-back data transmission can obtain maximum data rate over an optical fiber. For real experimental demonstration of the VLC system, the data rate is lower than back-to-back limited by communication distance, packaging of devices, optical power, channel loss, and other factors.

    The abovementioned E-O bandwidth value of 1.3 GHz for c-plane polar micro-LEDs before packaging is tested on wafer using a plastic optical fiber to export light which exhibits the LED under a radio-frequency ground-signal (RF GS) micro-probe. It is not difficult to notice that there is no communication distance in some publications, which is impossible in the real application of VLC systems [23]. Therefore, the data rate from testing on wafer by the GS micro-probe with collecting by plastic optical fiber over 0 m free-space communication distance as shown in Fig. 8(b) is totally different from a real system compared with the micro-LED-based VLC system in Fig. 6(a). The measured modulation bandwidth of 1 GHz is limited by the bandwidth of the APD receiver and influenced by the free-space channel conditions and the attenuation of the optical power, which results in the decline of bandwidth from 1.3 to 1 GHz.

    C. System Communication Performances Measurement

    (a) Normalized frequency responses of the VLC system with various current densities. (b) The extracted 3-dB modulation bandwidth and received optical power.

    Figure 9.(a) Normalized frequency responses of the VLC system with various current densities. (b) The extracted 3-dB modulation bandwidth and received optical power.

    Comparison of optical power between the emitter side and the receiver side and the I–V properties of the micro-LED.

    Figure 10.Comparison of optical power between the emitter side and the receiver side and the IV properties of the micro-LED.

    (a) Data rates versus BER for the experimentally obtained results and the eye diagrams of (b) 1.0 Gbps, (c) 1.2 Gbps, (d) 1.4 Gbps, (e) 1.6 Gbps, (f) 1.8 Gbps, and (g) 2.0 Gbps data rates at the driving current density of 528.54 A/cm2.

    Figure 11.(a) Data rates versus BER for the experimentally obtained results and the eye diagrams of (b) 1.0 Gbps, (c) 1.2 Gbps, (d) 1.4 Gbps, (e) 1.6 Gbps, (f) 1.8 Gbps, and (g) 2.0 Gbps data rates at the driving current density of 528.54  A/cm2.

    SNR versus data rate of the micro-LED-based VLC system using NRZ-OOK format at different current densities.

    Figure 12.SNR versus data rate of the micro-LED-based VLC system using NRZ-OOK format at different current densities.

    (a) Data rate and related BER of QPSK-OFDM at different current densities and the constellation diagrams with the data rate change of (b) 1 Gbps, (c) 2 Gbps, (d) 3 Gbps, and (e) 4 Gbps at the current density of 528.54 A/cm2.

    Figure 13.(a) Data rate and related BER of QPSK-OFDM at different current densities and the constellation diagrams with the data rate change of (b) 1 Gbps, (c) 2 Gbps, (d) 3 Gbps, and (e) 4 Gbps at the current density of 528.54  A/cm2.

    Corresponding frequency spectrograms with the data rate change from 1 to 4 Gbps at the current density of 178.82 A/cm2.

    Figure 14.Corresponding frequency spectrograms with the data rate change from 1 to 4 Gbps at the current density of 178.82  A/cm2.

    Finally, we compare our wetting layer micro-LED-based VLC system with other point-to-point VLC systems based on single-pixeled LEDs which have been reported in other literature. As shown in Table 2, compared with the works of Islim et al. with a distance-rate product of 2.0566  Gbps·m and the works of Xie et al. with a distance-rate product of 1.554  Gbps·m [13,17], combining with communication distance over 3 m, our micro-LED based VLC system has obvious performance advantages including the highest distance-bandwidth product of 3 GHz·m and the highest distance-rate product of 12 Gbps·m based on the QPSK-OFDM format, and all these records can only be obtained by taking advantage of the superior performance of our micro-LED device.

    Performance of VLC Systems Based on Single-Pixeled Micro-LED (Summary of Part of Existing Works)

    YearGroupμLEDa TypeOptical Power (mW)Bandwidth (MHz)Modulation FormatHighest Data Rate (Gbps)BERDistance (m)
    2014[10] D. Tsonev et al.Blue μLED4.560mQAM-OFDMb3<0.0020.05
    2015[11] J. McKendry et al.UVc μLED2.5130mQAM-OFDM3.322.1×103
    2016[12] R. Ferreira et al.Blue μLED2.7800NRZ-OOKd1.7<FEC0.5
    5.7PAM4e3.50.75
    mQAM-OFDM50.75
    2017[13] M. Islim et al.Violet μLED0.32655mQAM-OFDM7.91<FEC0.26
    2017[35] X. Liu et al.μLED0.8230NRZ-OOK1.33.4×1033
    13.2×10310
    0.873.5×10316
    2018[16] S. Mei et al.μLED + YQDsf16lux85NRZ-OOK0.32×103
    2018[36] X. Liu et al.μLED-based detectorNRZ-OOK0.1853.5×1031
    2019[17] E. Xie et al.3×3 μLED arrays18285NRZ-OOK2.1<FEC0.3
    PAM42.550.3
    mQAM-OFDM5.180.3
    2019[15] X. He et al.UV μLEDs0.196438NRZ-OOK0.83.8×1030.3
    mQAM-OFDM1.1
    2019[37] J. Carreira et al.Dual-color μLED arrays0.85/1.04427/134mQAM-OFDM3.350.3
    2020Our workBlue wetting layer μLED0.82g1000NRZ-OOK2<FEC3
    QPSK-OFDMh43

    μLED: micro-size LED.

    QAM-OFDM: quadrature amplitude modulation-orthogonal frequency division multiplexing.

    UV: ultraviolet.

    NRZ-OOK: non-return-to-zero on-off-keying.

    PAM4: pulse-amplitude-modulation 4-level.

    YQDs: yellow quantum dots.

    The emitting optical power at the current density of 528.54  A/cm2 after packaging as shown in Fig. 10.

    QPSK-OFDM: quadrature phase shift keying-orthogonal frequency-division multiplexing.

    4. CONCLUSION

    In conclusion, for solving the intrinsic bandwidth limitation of luminescent devices in the VLC systems, self-assembly grown nano-structured InGaN wetting layers were adopted as the active layers of a high-speed LED. A 480-nm blue micro-LED with 1.3 GHz E-O bandwidth on c-plane GaN is presented in this paper which is much higher than any other reports based on the c-plane epitaxy. The VLC system modulation bandwidth can reach 1 GHz after using the packaged micro-LED as transmitter. In addition, to give a comprehensive evaluation, we employed the micro-LEDs in a VLC system and demonstrate a 3-m data transmission over air channel, which has the highest distance-bandwidth product of 3 GHz·m among all the point-to-point VLC systems based on a single-pixel LED. By employing a 2311 bits NRZ-OOK signal without using non-linearity mitigation or equalization techniques, the received eye diagrams are clear when observed at 2 Gbps data rates with a low current density of 407  A/cm2 and a BER of 1.2×103. We achieved a record-breaking data rate among all the single-pixel LED-based point-to-point VLC systems using simple NRZ-OOK modulation. As for QPSK-OFDM, we demonstrated a data rate of 4 Gbps with a BER of 3.2×103, which is the highest distance-rate product of 12 Gbps·m among all the point-to-point single-pixel LED-based VLC systems. It further proves the promising potential of our proposed InGaN wetting layer micro-LED in the next generation of high-speed VLC.

    References

    [1] A. Tsiatmas, C. P. M. J. Baggen, F. M. J. Willems, J. M. G. Linnartz, J. W. M. Bergmans. An illumination perspective on visible light communications. IEEE Commun. Mag., 52, 64-71(2014).

    [2] Z. Zeng, S. Fu, H. Zhang, Y. Dong, J. Cheng. A survey of underwater optical wireless communications. IEEE Commun. Surveys Tuts., 19, 204-238(2017).

    [3] C. Tsai, C. Cheng, H. Kuo, G. Lin. Toward high-speed visible laser lighting based optical wireless communications. Prog. Quantum Electron., 67, 100225(2019).

    [4] W. Hu, H. Cong, W. Huang, Y. Huang, L. Chen, A. Pan, C. Xue. Germanium/perovskite heterostructure for high-performance and broadband photodetector from visible to infrared telecommunication band. Light Sci. Appl., 8, 106(2019).

    [5] K. Ho, R. Chen, G. Liu, C. Shen, J. Holguin-Lerma, A. A. Al-Saggaf, T. K. Ng, M. Alouini, J. He, B. S. Ooi. 3.2 gigabit-per-second visible light communication link with InGaN/GaN MQW micro-photodetector. Opt. Express, 26, 3037-3045(2018).

    [6] D. V. Dinh, Z. Quan, B. Roycroft, P. J. Parbrook, B. Corbett. GHz bandwidth semipolar (112-2) InGaN/GaN light-emitting diodes. Opt. Lett., 41, 5752-5755(2016).

    [7] K. Rajabi, J. Wang, J. Jin, Y. Xing, L. Wang, Y. Han, C. Sun, Z. Hao, Y. Luo, K. Qian, C. Chen, M. Wu. Improving modulation bandwidth of c-plane GaN-based light-emitting diodes by an ultra-thin quantum wells design. Opt. Express, 26, 24985-24991(2018).

    [8] H. Han, H. Lin, C. Lin, W. Chong, J. Li, K. Chen, P. Yu, T. Chen, H. Chen, K. Lau, H. Kuo. Resonant-enhanced full-color emission of quantum-dot-based micro LED display technology. Opt. Express, 23, 32504-32515(2015).

    [9] T. Wu, C. Sher, Y. Lin, C. Lee, S. Liang, Y. Lu, S. H. Chen, W. Guo, H. Kuo, Z. Chen. Mini-LED and micro-LED: promising candidates for the next generation display technology. Appl. Sci., 8, 1557(2018).

    [10] D. Tsonev, H. Chun, S. Rajbhandari, J. J. D. McKendry, S. Videv, E. Gu, M. Haji, S. Watson, A. E. Kelly, G. Faulkner, M. D. Dawson, H. Haas, D. O’Brien. A 3-Gb/s single-LED OFDM-based wireless VLC link using a gallium nitride μLED. IEEE Photonics Technol. Lett., 26, 637-640(2014).

    [11] J. J. D. McKendry, D. Tsonev, R. Ferreira, S. Videv, A. D. Griffiths, S. Watson, E. Gu, A. E. Kelly, H. Haas, M. D. Dawson. Gb/s single-LED OFDM-based VLC using violet and UV gallium nitride μLEDs. IEEE Summer Topicals Meeting Series (SUM), 175-176(2015).

    [12] R. X. G. Ferreira, E. Xie, J. J. D. McKendry, S. Rajbhandari, H. Chun, G. Faulkner, S. Watson, A. E. Kelly, E. Gu, R. V. Penty, I. H. White, D. C. O. Brien, M. D. Dawson. High bandwidth GaN-based micro-LEDs for multi-Gb/s visible light communications. IEEE Photonics Technol. Lett., 28, 2023-2026(2016).

    [13] M. S. Islim, R. X. Ferreira, X. He, E. Xie, S. Videv, S. Viola, S. Watson, N. Bamiedakis, R. V. Penty, I. H. White, A. E. Kelly, E. Gu, H. Haas, M. D. Dawson. Towards 10 Gb/s orthogonal frequency division multiplexing-based visible light communication using a GaN violet micro-LED. Photon. Res., 5, A35-A43(2017).

    [14] C. Chen, J. Yan, D. Chen, K. Lin, K. Feng, M. Wu. A 520-nm green GaN LED with high bandwidth and low current density for gigabits OFDM data communication. Optical Fiber Communication Conference (OFC), Th2A.18(2018).

    [15] X. He, E. Xie, M. S. Islim, A. A. Purwita, J. J. D. McKendry, E. Gu, H. Haas, M. D. Dawson. 1 Gbps free-space deep-ultraviolet communications based on III-nitride micro-LEDs emitting at 262 nm. Photon. Res., 7, B41-B47(2019).

    [16] S. Mei, X. Liu, W. Zhang, R. Liu, L. Zheng, R. Guo, P. Tian. High-bandwidth white-light system combining a micro-LED with perovskite quantum dots for visible light communication. ACS Appl. Mater. Interface, 10, 5641-5648(2018).

    [17] E. Xie, X. He, M. S. Islim, A. A. Purwita, J. J. D. McKendry, E. Gu, H. Haas, M. D. Dawson. High-speed visible light communication based on a III-nitride series-biased micro-LED array. J. Lightwave Technol., 37, 1180-1186(2019).

    [18] S. Tsai, C. Lu, C. Liu. Piezoelectric effect on compensation of the quantum-confined Stark effect in InGaN/GaN multiple quantum wells based green light-emitting diodes. Nano Energy, 28, 373-379(2016).

    [19] J. Shi, K. Chi, J. Wun, J. E. Bowers, Y. Shih, J. Sheu. III-nitride-based cyan light-emitting diodes with GHz bandwidth for high-speed visible light communication. IEEE Electron Device Lett., 37, 894-897(2016).

    [20] H. Lan, I. Tseng, H. Kao, Y. Lin, G. Lin, C. Wu. 752-MHz modulation bandwidth of high-speed blue micro light-emitting diodes. IEEE J. Quantum Electron., 54, 3300106(2018).

    [21] A. Rashidi, M. Monavarian, A. Aragon, A. Rishinaramangalam, D. Feezell. Nonpolar m-plane InGaN/GaN micro-scale light-emitting diode with 1.5 GHz modulation bandwidth. IEEE Electron Device Lett., 39, 520-523(2018).

    [22] M. Monavarian, A. Rashidi, A. A. Aragon, M. Nami, S. H. Oh, S. P. DenBaars, D. Feezell. Trade-off between bandwidth and efficiency in semipolar (2021) InGaN/GaN single-and multiple-quantum-well light-emitting diodes. Appl. Phys. Lett., 112, 191102(2018).

    [23] M. Monavarian, A. Rashidi, A. A. Aragon, S. H. Oh, A. K. Rishinaramangalam, S. P. DenBaars, D. Feezell. Impact of crystal orientation on the modulation bandwidth of InGaN/GaN light-emitting diodes. Appl. Phys. Lett., 112, 041104(2018).

    [24] M. Haemmer, B. Roycroft, M. Akhter, D. V. Dinh, Z. Quan, J. Zhao, P. J. Parbrook, B. Corbett. Size-dependent bandwidth of semipolar (1122) light-emitting-diodes. IEEE Photonics Technol. Lett., 30, 439-442(2018).

    [25] H. Gao, F. Yan, Y. Zhang, J. Li, Y. Zeng, J. Wang. Growth of nonpolar a-plane GaN on nano-patterned r-plane sapphire substrates. Appl. Surf. Sci., 255, 3664-3668(2009).

    [26] L. Wang, L. Wang, J. Yu, Z. Hao, Y. Luo, C. Sun, Y. Han, B. Xiong, J. Wang, H. Li. Abnormal Stranski–Krastanov mode growth of green InGaN quantum dots: morphology, optical properties, and applications in light-emitting devices. ACS Appl. Mater. Interface, 11, 1228-1238(2019).

    [27] A. Hu, H. Tian, Q. Liu, L. Wang, L. Wang, X. He, Y. Luo, X. Guo. Graphene on self-assembled InGaN quantum dots enabling ultrahighly sensitive photodetectors. Adv. Opt. Mater., 7, 1801792(2019).

    [28] M. Arita, F. Le Roux, M. J. Holmes, S. Kako, Y. Arakawa. Ultraclean single photon emission from a GaN quantum dot. Nano Lett., 17, 2902-2907(2017).

    [29] Z. Gačević, M. Holmes, E. Chernysheva, M. Müller, A. Torres-Pardo, P. Veit, F. Bertram, J. Christen, J. M. González Calbet, Y. Arakawa, E. Calleja, S. Lazić. Emission of linearly polarized single photons from quantum dots contained in nonpolar, semipolar, and polar sections of pencil-like InGaN/GaN nanowires. ACS Photonics, 4, 657-664(2017).

    [30] D. Wang, T. Zhu, R. A. Oliver, E. L. Hu. Ultra-low-threshold InGaN/GaN quantum dot micro-ring lasers. Opt. Lett., 43, 799-802(2018).

    [31] G. Weng, Y. Mei, J. Liu, W. Hofmann, L. Ying, J. Zhang, Y. Bu, Z. Li, H. Yang, B. Zhang. Low threshold continuous-wave lasing of yellow-green InGaN-QD vertical-cavity surface-emitting lasers. Opt. Express, 24, 15546-15553(2016).

    [32] E. P. O. Reilly, S. Schulz. Theory of reduced built-in polarization field in nitride-based quantum dots. Phys. Rev. B, 82, 033411(2010).

    [33] M. Zhang, P. Bhattacharya, W. Guo. InGaN/GaN self-organized quantum dot green light emitting diodes with reduced efficiency droop. Appl. Phys. Lett., 97, 011103(2010).

    [34] L. Wang, D. Yang, Z. Hao, Y. Luo. Metal–organic–vapor phase epitaxy of InGaN quantum dots and their applications in light-emitting diodes. Chin. Phys. B, 24, 067303(2015).

    [35] X. Liu, P. Tian, Z. Wei, S. Yi, Y. Huang, X. Zhou, Z.-J. Qiu, L. Hu, Z. Fang, C. Cong, L. Zheng, R. Liu. Gbps long-distance real-time visible light communications using a high-bandwidth GaN-based micro-LED. IEEE Photonics J., 9, 7204909(2017).

    [36] X. Liu, R. Lin, Z. Qian, H. Chen, X. Zhou, G. Zhou, X. Cui, X. Zhou, L. Zheng, R. Liu, P. Tian. An InGaN micro-LED based photodetector array for high-speed parallel visible light communication. Asia Communications and Photonics Conference (ACP), 1-3(2018).

    [37] J. F. C. Carreira, E. Xie, R. Bian, C. Chen, J. J. D. McKendry, B. Guilhabert, H. Haas, E. Gu, M. D. Dawson. On-chip GaN-based dual-color micro-LED arrays and their application in visible light communication. Opt. Express, 27, A1517-A1528(2019).

    Lei Wang, Zixian Wei, Chien-Ju Chen, Lai Wang, H. Y. Fu, Li Zhang, Kai-Chia Chen, Meng-Chyi Wu, Yuhan Dong, Zhibiao Hao, Yi Luo. 1.3 GHz E-O bandwidth GaN-based micro-LED for multi-gigabit visible light communication[J]. Photonics Research, 2021, 9(5): 792
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