• Infrared and Laser Engineering
  • Vol. 45, Issue 6, 618001 (2016)
Yuan Wei*, Fan Rongwei, Yu Xin, and Chen Deying
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/irla201645.0618001 Cite this Article
    Yuan Wei, Fan Rongwei, Yu Xin, Chen Deying. Analysis and simulation of point-focusing property of a quadrupole lens pair[J]. Infrared and Laser Engineering, 2016, 45(6): 618001 Copy Citation Text show less

    Abstract

    A pair of quadrupole lens has excellent imaging performance, electrostatic quadrupole lens can focus the electron beam into a line, quadrupole lens pairs have the ability to focus the electron beam into a point. The point-focusing property of a quadrupole lens pair was investigated in this paper, using the electron ray tracing simulation program SIMION. The simulation of electron distribution quantitatively showed that the fringing field at both ends and the aberration in the crossover image caused an electron beam blur. The aberration of a quadrupole lens pair as a function of the electron initial kinetic energy was discussed, and the result indicated that the aberration would be effectively reduced if the kinetic energy of electrons increased. 10 000 electrons were flown in a SIMION simulation and the entry angle α0 is randomly varied so that -1°<α0<1°, the size of diffuse spot at the focal plane reduced to 3.2 μm×28 μm as the kinetic energy of electrons increased to 1×105 eV.
    Yuan Wei, Fan Rongwei, Yu Xin, Chen Deying. Analysis and simulation of point-focusing property of a quadrupole lens pair[J]. Infrared and Laser Engineering, 2016, 45(6): 618001
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