• Acta Photonica Sinica
  • Vol. 45, Issue 7, 70712001 (2016)
TIAN Ai-ling1、*, MA Di1, WANG Da-sen2, LIU Jian1, LIU Bing-cai1, and ZHU Xue-liang1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/gzxb20164507.0712001 Cite this Article
    TIAN Ai-ling, MA Di, WANG Da-sen, LIU Jian, LIU Bing-cai, ZHU Xue-liang. Phase-shifting Calibration Method of Wavelength-shifting Interference Measurement[J]. Acta Photonica Sinica, 2016, 45(7): 70712001 Copy Citation Text show less
    References

    [1] XU Jian-cheng. Information-theoretic analysis of phase-measurement Interferometry[D]. Mianyang:China Academy of Engineering Physics, 2009.

    [2] ZHU Ri-hong, CHEN Lei, WANG Qing, et al. Phase-shift interferometry and its application[J]. Journal of Applied Optics, 2006, 27(2): 85-88.

    [3] WU Xu-hua. Study on key techniques of Φ300mm phase-shifting Interferometer[D]. Nanjing: Nanjing University of Science and Technology, 2007.

    [4] TAN Zhong-qi. The research of wavelength-tuned phase-shifting interferometry[D]. Hunan: Graduate school of National University of Defense Technology, 2003.

    [5] HAO Jing-jing. Reasearch of wavelength phase-shifting interferometry[D]. Nanjing: Nanjing University of Science and Technology, 2007.

    [6] YANG Mu. The research on the wavelength-tuned phase-shifting interferometry with long cavity[D]. Nanjing: Nanjing University of Science and Technology, 2012.

    [7] NIKOLAY V. Alignment of phase-shifting interferograms in the two-beam point diffraction interferometer[C]. SPIE, 2012, 8550: 85500R.

    [8] YU Jie-ying, ZHANG Ben-hao, JIAO Yun-fang. Algorithm of phase-shifting by wavelength tuning based on temporal DFT[J]. Acta Metrologica Sinica, 2004, 25(4): 310-313.

    [9] HUANG Wen-yu, GONG Jian-wei, LU Ji-lian. Phase-measuring profilometry based on phase-shift measurement using FFT[J].Journal of Beijing Institute of Technology, 2000, 20(6): 715-719.

    [10] GUO Ren-hui, LI Jian-xin, ZHU Ri-hong, et al. Wavelength-tuned phase-shifting calibration based on the Lissajous figures technique[J]. Optical Technique, 2010, 36(2): 200-204.

    [11] LIU Jian. Research on surface testing algorithm based on wavelength-shifting interferometry[D]. Xi′an: Xi′an Technological University, 2014.

    [12] LI Xi-shan, LIANG Jing-fang, WANG De-lin, et al. Φ60mm laser plane interferometer[J]. Optical Instruments, 2000, 22(2): 28-33.

    [13] LI Wen-zhe. Phase calibration method of wavelength-shifting interferometry[D]. Nanjing: Nanjing University of Science and Technology, 2009.

    [14] YUAN Qun, GAO Zhi-shan, LI Jian-xin, et al. The multiple beam interference phase extraction algorithm based on the average π/4 phase shift[J].Acta Optica Sinica, 2011, 31(11): 1112004.

    [15] GAO Fen, JIANG Zhuang-de, LI Bing, et al. Multi-step phase-shifting algorithm based on extended averaging technique and its error suppression characteristics comparison[J].Acta Photonica Sinica, 2014, 43(4): 0426001.

    TIAN Ai-ling, MA Di, WANG Da-sen, LIU Jian, LIU Bing-cai, ZHU Xue-liang. Phase-shifting Calibration Method of Wavelength-shifting Interference Measurement[J]. Acta Photonica Sinica, 2016, 45(7): 70712001
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