• Chinese Journal of Lasers
  • Vol. 37, Issue S1, 64 (2010)
Yin Cong1、*, Huang Shengye2, Zhang Shiwen3, Shi Chunying1, Liu Xiuying1, Wang Hanping1, Cai Shan1, and Qian Jin1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    DOI: 10.3788/cjl201037s1.0064 Cite this Article Set citation alerts
    Yin Cong, Huang Shengye, Zhang Shiwen, Shi Chunying, Liu Xiuying, Wang Hanping, Cai Shan, Qian Jin. Laser Diode Side Pumped Nd:YAG TEM00-Mode Laser for Reducing Taper of Micro Holes[J]. Chinese Journal of Lasers, 2010, 37(S1): 64 Copy Citation Text show less

    Abstract

    Laser diode (LD) pumped Nd:YAG laser is widely used in precise manufacture. A kind of simplified LD side pumped acousto-optic Q-switched Nd:YAG laser used for Al2O3 ceramic wafer micro drilling is described. The taper of the hole in Al2O3 ceramic wafer is reduced effectively when the laser beam quality is optimized by modifying the resonator structure. The TEM00-mode output power is above 20 W and the pulse width is about 200 ns when the laser is working at 10 kHz. And the M2 factor of the beam is lower than 1.5 in each direction.
    Yin Cong, Huang Shengye, Zhang Shiwen, Shi Chunying, Liu Xiuying, Wang Hanping, Cai Shan, Qian Jin. Laser Diode Side Pumped Nd:YAG TEM00-Mode Laser for Reducing Taper of Micro Holes[J]. Chinese Journal of Lasers, 2010, 37(S1): 64
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